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Dopants

The precise implanting of dopant ions into a wafer using an ion accelerator is a widely used method of forming junctions in semiconductor devices. The precision and uniformity of ion implantation is unequaled by any other process. Scott has been involved in the preparation of gases used in ion implantation since the inception of this technology, working closely with ion implantation equipment manufacturers to provide dopants of unequaled reliability. Scott's Electronic Materials Group offers a wide variety of dopants and maintains a stock of premixed materials on hand for immediate shipment and fast delivery. The table below lists our standard dopants - others are available on request. Dopant and Gas Mixtures PURE GAS or MIXTURE GRADE COMPONENT/ BALANCE GAS CYLINDER SIZE CGA PRESSURE (PSIG) CONTENTS Argon V.L.S.I. LB 580 1800 58 liters Arsine (Pure Gas/Gas Mixture) Electronic LB 350 205 30 grams D 350 205 164 grams 15% Arsine (balance Hydrogen) Electronic/Electronic LB 350 400 12 liters LB 350 800 24 liters D 350 400 66 liters D 350 800 132 liters Boron Trichloride (Pure Gas/Gas Mixture) Electronic LB 660 4.4 340 grams Boron Trifluoride (Pure Gas/Gas Mixture) Electronic LB 330 800 93 grams D 330 800 509 grams Helium Electronic LB 580 1800 51 liters Hydrogen Electronic LB 350 1800 51 liters 1% Hydrogen Selenide (balance Hydrogen) Optical/Electronic LB 350 800 24 liters 15% Hydrogen Selenide (balance Hydrogen) Optical/Electronic LB 350 800 24 liters Nitrogen Electronic LB 580 1800 54 liters Oxygen M.O.S. LB 540 1800 58 liters Phosphine (Pure Gas/Gas Mixture) Electronic LB 350 400 20 grams D 350 400 110 grams 15% Phosphine (balance Hydrogen) Electronic/Electronic LB 350 400 12 grams LB 350 800 24 grams D 350 400 66 grams D 350 800 132 grams Phosphorus Pentafluoride Electronic LB 330 400 65 grams Sulfur Hexafluoride Electronic LB 590 305 227 grams Careful Packaging Scott takes the time to properly prepare and package lectures bottles or D-size cylinders that are used to contain dopant products. Special care is taken to: Clean interior and paint exterior of cylinder Inspect valve to ensure proper material and CGA designation Install a gas-tight dust plug for all poison gases as well as any gas to be shipped air freight. Tag cylinder with appropriate information Label cylinder with product grade and appropriate D.O.T. hazard diamonds, hazard class and UN number Shrink wrap valve assembly Protect lecture bottle products with over-packaging: D.O.T. poison or poison gas products are shipped in 3/8 inch thick wooden boxes (D.O.T. 15B25); other products are over-packaged with corrugated cardboard Label over-packaging with appropriate D.O.T. information.

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