Scott Semiconductor Gases
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CGA/DISS Valve Outlets & Connections

REFERENCE
GAS CGA DISS
Ammonia 660 720
Argon 580 718
Arsine 350 632
Boron Trichloride 660 634
Boron Trifluoride 330 642
Carbon Dioxide 320 716
Carbon Monoxide 350 724
Chlorine 660 728
Diborane 350 632
Dichlorosilane 678 636
Germane 350 632
Halocarbon 14 580 or 320 716
Halocarbon 23 660 or 320 716
Halocarbon 32 350 724
Halocarbon 41 350 724
Halocarbon 116 660 or 320 716
Halocarbon 125 660 716
Halocarbon 134a 660 716
Halocarbon 218 660 716
Halocarbon c-318 660 716
Helium 580 718
Hydrogen 350 724
Hydrogen Bromide 330 634
Hydrogen Chloride 330 634
Methane 350 724
Neon 580 718
Nitric Oxide 660 728
Nitrogen 580 718
Nitrogen Trifluoride 330 640
Nitrous Oxide 326 712
Oxygen 540 -
Phosphine 350 632
Silane 350 632
Silicon Tetrachloride 330 636
Silicon Tetrafluoride 330 642
Sulfur Hexafluoride 590 716
Trichlorosilane 330 or 678 636
Xenon 580 718
CGA/Diss valve outlets & connections

 

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