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OmniGas® Two-Valve Panel
for Inert Gases
 Order toll-free: 866-704-6513 or Contact Us
Model 58PA200NB During process operations, gas flows through a regulator where the pressure is reduced from the high cylinder pressure to a lower, usable delivery pressure. A process isolation valve acts as a final isolation valve that can be closed for cylinder change out.
| General Features and Specifications |
Panel Dimensions: 9.5"H x 8.5"W
Construction: Orbital butt-welded, face-
seal connections, 15 Ra Max surface finish
Pressure Rating: 0-3000 psig inlet and
30-0-100 psig delivery pressure
Helium Leak Spec: Outboard 2 x 10-8
sccs @ 1,500-2,400 psig
Mechanical Assembly:
Class 100 Cleanroom
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Additional Capabilities: Line pure
Weight: 5 lbs.
Purge System: Single line pigtail
Backplate: 1/8" aluminum with anodized
flow schematics
Valves: 2-valves, high pressure vent,
process isolation
Gas service: Ar, He, N2, O2 |
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| Components |
| Regulator: 316L SS body, PCTFE seal and seat |
Tubing: 316L SS, ASTM A 632 |
| Valves: 316L SS, PCTFE stem tip diaphragm type |
Fittings: 316L SS |
| Gauges: 316L SS wetted surface, 300 SS case |
Backplate: 1/8" aluminum, grained, anodized |
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OmniGas® Purgeable Panel
for Toxic Gases
Order toll-free: 866-704-6513 or Contact Us
Model 58PA200SVA This purgeable panel is equipped with a process cylinder
and a Venturi supply valve. Purging is accomplished through alternate cycling
between a nitrogen isolation valve and a high-pressure vent with the regulator isolation
valve closed. A check valve prevents backflow of process gas to the purge
supply gas source. Built-in check valves in the Venturi Module protect the Venturi's
nitrogen/CDA source and the panel from cross contamination.
| General Features and Specifications |
Panel Dimensions: 14"H x 11"W
Construction: Orbital butt-welded, face-
seal connections, 15 Ra Max surface finish
Pressure Rating: 0-3000 psig inlet
Helium Leak Spec: Outboard 2 x 10-8
sccs @ 1,500-2,400 psig
Mechanical Assembly:
Class 100 Cleanroom
Additional Capabilities: Line Purge,
trickle purge
Weight: 20 lbs. |
Purge System: "Deep Purge" dual-leg
pigtail introducing purge gas close to
the process gas CGA connection
Backplate: 1/8" aluminum with anodized
flow schematics
Valves:7-valves, high and low pressure
vents;
process, regulator and nitrogen
isolation; emergency shutoff; Venturi
Supply
Gas service: NF3, BF3, CL2, HBr, HCl,
siHCl3, Si2H6, H2Se, H2S, PH3, SiH4,
GeH4, AsH3
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| Components |
| Regulator: 316L SS body, PCTFE seal and seat |
Tubing: 316L SS, ASTM A 632 |
| Valves: 316L SS, PCTFE stem tip diaphragm type |
Fittings: 316L SS |
| Gauges: 316L SS wetted surface, 300 SS case |
Backplate: 1/8" aluminum, grained, anodized |
| Venturi: |
Module with built-in valve, check valves, vacuum generator;
316 SS housing, wetted parts |
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