Scott Specialty Gases for semiconductor & electronic applications
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Gas Cabinets

OmniGas Manual Gas Cabinet
OmniGas
® Manual Gas Cabinet

with Seven-Valve Process Panel
and Two-Valve Purge Panel

 

semi Order Gas Cabinets toll-free: 866-704-6513 or Contact Us

OmniGas Manual Gas Cabinet
Safety Benefits
Integral sprinkler system for extra fire protection
Meets or exceeds Uniform Building and Fire Code, Federal and Cal OSHA, NFPA and SEMI Standards
One hour rated for fire

Model 59-PA-200SVA-2N Features
Specifications
Seven-valve process panel with vacuum generator
Two-valve purge panel
11-gauge steel, all-welded, one-piece construction
Diamond deck flooring - no ramps required
Wire reinforced window, hinged top, Teflon® catch
Vertically adjustable cylinder brackets
Used with: BF3, Si2H6, GeH4, Cl2, AsH3,HBr, H2Se, H2S, NF3, PH3, SiH4, SiHCl3
Emergency shutoff valve

Options
Emergency Shutdown System
Exhaust flow sensor
Custom colors (standard is Nitro Blue)
Custom sizes
Vertically adjustable shelves
Locking door latch
Rubber floor mats
8" exhaust stack

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