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| Safety Benefits |
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Integral sprinkler system for extra fire protection |
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Meets or exceeds Uniform Building and Fire Code, Federal and Cal OSHA, NFPA and SEMI Standards |
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One hour rated for fire |
| Model 59-PA-200SVA-2N Features |
| Specifications |
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Seven-valve process panel with vacuum generator |
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Two-valve purge panel |
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11-gauge steel, all-welded, one-piece construction |
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Diamond deck flooring - no ramps required |
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Wire reinforced window, hinged top, Teflon® catch |
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Vertically adjustable cylinder brackets |
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Used with: BF3, Si2H6, GeH4, Cl2, AsH3,HBr, H2Se, H2S, NF3, PH3, SiH4, SiHCl3 |
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Emergency shutoff valve |
| Options |
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Emergency Shutdown System |
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Exhaust flow sensor |
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Custom colors (standard is Nitro Blue) |
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Custom sizes |
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Vertically adjustable shelves |
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Locking door latch |
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Rubber floor mats |
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8" exhaust stack |
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