Scott Specialty Gases for semiconductor and electronic applications
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Ion Implant Gases

 

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Arsine
  
VLSI Grade (volume in liters)
D (2.4) LB (0.4)
Contents (grams) 164 45
Pressure (psig)
205 205
CGA/DISS
 350/632
Shelf Life: 2 years

 

15% Arsine
 Balance Hydrogen
VLSI Grade (volume in liters)
D (2.4) LB (0.4)
Contents (liters) 132 66 24 12
Pressure (psig)
800 400 800 400
CGA/DISS
 350/632
Shelf Life: 1 year

 

Boron Trichloride
 
Electronic Grade (volume in liters)
LB (0.4)
Contents (grams) 340
Pressure (psig)
4.4
CGA/DISS
 660/634
Shelf Life: 1 year

 

Boron Trifluoride  
Electronic Grade (volume in liters)
D (2.4) LB (0.4)
Contents (grams) 509 93
Pressure (psig)
800 800
CGA/DISS
 350/642
Shelf Life: 1 year

 

Phosphine
  
VLSI Grade (volume in liters)
D (2.4) LB (0.4)
Contents (grams) 454 45
Pressure (psig)
485 485
CGA/DISS
 350/632
Shelf Life: 2 years

 

15% Phosphine
 Balance Hydrogen
VLSI Grade (volume in liters)
D (2.4) LB (0.4)
Contents (liters) 132 66 24 12
Pressure (psig)
800 400 800 400
CGA/DISS
 350/632
Shelf Life: 1 year

 

Phosphorous Pentafluoride
 
Electronic Grade (volume in liters)
LB (0.4)
Contents (grams) 65
Pressure (psig)
400
CGA/DISS
 330/642
Shelf Life: 1 year

Note: Additional pures and mixes available in LB size cylinders - please inquire.

 

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