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Phosphine Gas Mixtures

PH3

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PHOSPHINE
Balance Gas Argon
Cylinder Size (volume in liters)
K (50) A (44) B (17) C (7)
Concentration: 5 ppm - 15%*
270 cf 227 cf 75 cf 31 cf
Pressure @ 70°F (psig)
2,150 2,000 1,800 1,800

 

PHOSPHINE
Balance Gas Helium
Cylinder Size (volume in liters)
K (50) A (44) B (17) C (7)
Concentration: 5 ppm - 15%*
235 cf 200 cf 66 cf 28 cf
Pressure @ 70°F (psig)
2,150 2,000 1,800 1,800

 

PHOSPHINE
Balance Gas Hydrogen
Cylinder Size (volume in liters)
K (50) A (44) B (17) C (7)
Concentration: 5 ppm - 15%*
235 cf 196 cf 66 cf 28 cf
Pressure @ 70°F (psig)
2,150 2,000 1,800 1,800

 

PHOSPHINE
Balance Gas Nitrogen
Cylinder Size (volume in liters)
K (50) A (44) B (17) C (7)
Concentration: 5 ppm - 15%*
250 cf 210 cf 74 cf 29 cf
Pressure @ 70°F (psig)
2,150 2,000 1,800 1,800
*Phosphine concentrations aboue 10% may have reduced pressures and contents.

 

PHOSPHINE
Balance Gas Silane
Cylinder Size (volume in liters)
A (44)
Concentration: 5% - 30% **
5,000 grams 2,500 grams 1,000 grams
**Cylinder fill pressure is dependent on desired contents.

 

PHOSPHINE GAS MIXTURES
Mixture Tolerances
Concentration Range: 5 - 499 ppm 500 ppm - 2% > 2%  
Blend Tolerance*: ±10% ±5% ±2%  
Shelf Life:
*Custom blend tolerances available.
1 year 2 years 2 years  

DOT Label
 
DOT Class
UN
No.
CGA/
DISS
Mtl. of Construction
PH3 1.6% bal Ar, He, N2 WHITE, Inhalation Hazard; RED, Flammable Gas
2.3
UN 1953
350/632
Steel Alloy
4000 ppm PH3 ‹ 1.6% bal Ar, He, N2 WHITE, Inhalation Hazard
2.3
UN 1955
350/632
Steel Alloy
PH3 ‹ 4000 ppm bal Ar, He, N2 GREEN, Nonflammable Gas
2.2
UN 1956
350/632
Steel Alloy
PH3 4000 ppm bal H2 WHITE, Inhalation Hazard; RED, Flammable Gas
2.3
UN 1953
350/632
Steel Alloy
PH3 ‹ 4000 ppm bal H2 RED, Flammable Gas
2.1
UN 1954
350/632
Steel Alloy
Note: see Ion Implant Gases for LB and D size cylinders. Other cylinder sizes available - contact your sales represetnative for more information.

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