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Plasma Etching Mixtures

 

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Oxygen
Balance Halocarbon 14
Cylinder Size (volume in liters)
A (44) B (l7) C (7)
Concentration: 4%, 8%, 10% 300 cf 117 cf 48 cf
8.5% (DE - 100) * 300 cf 117 cf 48 cf
17.5% (PDE - 100) * 290 cf 115 cf 47 cf
Pressure @ 70°F (psig)
2,000 2,000 2,000
Shelf Life
3 years

 

Oxygen/Halocarbon 14
Balance Helium
Cylinder Size (volume in liters)
A (44) B (l7) C (7)
Concentration: 1.76% O2, 18.94% CF4 (DE -100C)* 205 cf 80cf 33 cf
0.485% O2, 3% CF4 (DE - 101)* 215 cf 84 cf 33 cf
39.91% O2. 0.22% CF4 (DS - 100)* 215 cf 84 cf 33 cf
Pressure @ 70°F (psig)
2,000 2,000 2,000
Shelf Life
3 years

 

Halocarbon 14
Balance Oxygen
Cylinder Size (volume in liters)
A (44) B (l7) C (7)
Concentration: 8% (DS - 180)* 224 cf 81 cf 32 cf
3% (DS - 300)* 224 cf 81 cf 32 cf
Pressure @ 70°F (psig)
1,800 1,800 1,800
Shelf Life
3 years
*The parenthesis denote LFE Designation.

 

DOT Label
 
DOT Class
UN
No.
CGA/
DISS
Mtl. of Construction
DS-180 and 300 GREEN, Nonflammable Gas
2.2
UN 1956
540/714
Steel Alloy
DS-100 GREEN, Nonflammable Gas; YELLOW, Oxidizer
2.2
UN 3156
590/714
Steel Alloy
All others GREEN, Nonflammable Gas
2.2
UN 1956
590/714
Steel Alloy
Note: Other cylinder sizes available - contact your sales representative for more information.

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