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Silane Gas Mixtures

SiH4

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SILANE
 Balance Gas Argon
Cylinder Size (volume in liters)
A (44) B (17)
Concentration: 5 ppm-15%
 227 cf 75 cf
Pressure @ 70°F (psig)
2,000 1,800

 

SILANE
 Balance Gas Helium
Cylinder Size (volume in liters)
A (44) B (17)
Concentration: 5 ppm-15%
 199 cf 66 cf
Pressure @ 70°F (psig)
2,000 1,800

 

SILANE
 Balance Gas Hydrogen
Cylinder Size (volume in liters)
A (44) B (17)
Concentration: 5 ppm-15%
 199 cf 66 cf
Pressure @ 70°F (psig)
2,000 1,800

 

SILANE
Balance Gas Nitrogen
Cylinder Size (volume in liters)
A (44) B (17)
Concentration: 5 ppm-15%
 210 cf 74 cf
Pressure @ 70°F (psig)
2,000 1,800

 

SILANE GAS MIXTURES
Mixture Tolerances
Concentration Range: 25 - 499 ppm 500 ppm - 2% > 2%  
Blend Tolerance*: ±10% ±5% ±2%  
Shelf Life:
*Custom blend tolerances available. 		1 year 2 years 2 years  

DOT Label
 
DOT Class
UN
No.
CGA/
DISS
Mtl. of Construction
SiH4 › 1% bal Ar, He, N2 RED, Flammable Gas
2.1
UN 1954
350/632
Steel Alloy
SiH4‹ 1 % bal Ar, He, N2 GREEN, Nonflammable Gas
2.2
UN 1956
350/632
Steel Alloy
SiH4 bal H2 RED, Flammable Gas
2.1
UN 1954
350/632
Steel Alloy
Note: see Ion Implant Gases for LB and D size cylinders. Other cylinder sizes available - contact your sales representative for more information.

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