| DESCRIPTION: |
Ammonia (NH3) is a colorless, toxic, alkaline, slightly
flammable gas with a pungent odor, irritating to eyes, skin and mucous
membranes in high concentrations. Shipped as a liquefied gas under
its own vapor pressure (111 psig @ 70 °F). |
| APPLICATION: |
Ammonia is used as a reactant gas in the
deposition of silicon nitride layers. Ammonia is often used in conjunction with
dichlorosilane or silane. |
 Order Ammonia toll-free: 866-704-6513 or Contact Us
|
| Critical Assay |
99.999% |
99.9995% |
| Meets SEMI Specification |
- |
SEMI C3.12-94 |
| Nitrogen |
< 5 ppm |
< 1 ppm |
| Oxygen |
< 2 ppm |
< 1 ppm |
| Total Hydrocarbons (as CH4) |
< 1 ppm |
< 1 ppm |
| Carbon Monoxide |
< 1 ppm |
< 1 ppm |
| Water |
< 5 ppm |
< 1 ppm |
| Hydrogen |
< 1 ppm |
< 1 ppm |
| Valve Material |
316L SS |
316L SS |
| Valve Design |
Diaphragm |
Diaphragm |
| CGA/DISS Connection |
660 |
660/720 |
Molecular
Weight: |
17.03 |
Specific
Volume: |
22.7cf/lb @ NTP |
Boiling
Point: |
-28.2°F @ 1 atm |
CAS
No.: |
7664-41-7 |
Hazards: |
Inhalation, Skin and Eye Contact |
|
| Safety
Data: |
LC50 Rat: 7.338 ppm
ACGIH - TLV: 25 ppm
NIOSH IDLH: 300 ppm
NIOSH STEL: 35 ppm |
| Vapor Pressure
Data: |
| |
61.8 psia @ 32°F
125.7 psia @ 70°F |
|
| AMMONIA |
|
|
|
|
|
| Cylinder Data/Size |
A |
AL |
B |
C |
LB |
| Internal Volume (liters): |
44 |
30 |
17 |
7 |
0.4 |
| Contents (pounds): |
50 |
30 |
15 |
5 |
0.5 |
| Phase Break @ 70°F (lbs): |
0.59 |
0.39 |
0.23 |
0.09 |
0.01 |
| Pressure @ 70°F
(psig): |
111 |
111 |
111 |
111 |
111 |
| RFO Size (inches): |
0.010 |
0.014 |
0.020 |
0.030 |
0.040 |
| Maximum Flow (scf/h): |
10.1 |
19.9 |
40.5 |
88.9 |
162.1 |
| Pressure (psig): |
125.7 |
|
|
|
| DOT Label: Green, Nonflammable Gas |
UN Number: UN 1005 |
|
| DOT Class:
2.2 |
Cylinder: Aluminum or steel alloy |
|
| Recommended OmniGas®
Panels: Purgeable panel for corrosive gases - Model No.
58PA200SVA-H - please inquire |
| Shelf Life: 2 years |
|
| |
