| DESCRIPTION: |
Argon (Ar) is a colorless, odorless, nontoxic,
nonflammable, nonreactive gas which acts as an asphyxiant by displacing
air. Normally compressed and shipped at high pressure. |
| APPLICATION: |
Argon is commonly used in purging, annealing, sputtering
and ion milling applications. Argon is also used as an inerting gas in
pulling silicon crystals. |
| Critical Assay |
99.999% |
99.9995% |
99.9999% |
| Meets SEMI Specification |
SEMI C3.14-94 |
SEMI C3.14-94 |
SEMI C3.14-94 |
| Nitrogen |
< 8 ppm |
< 4 ppm |
< 0.5 ppm |
| Oxygen |
< 1 ppm |
< 1 ppm |
< 0.2 ppm |
| Total Hydrocarbons (as CH4) |
< 0.5 ppm |
< 0.2 ppm |
< 0.1 ppm |
| Carbon Dioxide + Carbon Monoxide |
< 0.5 ppm |
< 0.2 ppm |
< 0.2 ppm |
| Water |
< 1 ppm |
< 1 ppm |
< 0.5 ppm |
| Hydrogen |
< 1 ppm |
< 1 ppm |
< 0.5 ppm |
| Valve Material |
Brass |
Brass |
316L SS |
| Valve Design |
Diaphragm |
Diaphragm |
Diaphragm |
| CGA/DISS Connection |
580 |
580 |
580/718 |
Molecular Weight: |
39.95 |
Specific Volume: |
9.68cf/lb @ NTP |
Boiling Point: |
-302.6°F @ 1atm |
CAS No.: |
7440-37-1 |
| Hazards: |
High Pressure and Suffocation |
|
| Safety Data: |
Simple Asphyxiant |
| Physical
Properties Data: |
|
Critical Temperature: -188.4°F |
| |
Critical Pressure: 711.5 psia |
|
| ARGON |
|
|
|
|
|
|
| Cylinder Data/Size |
K |
A |
AL |
B |
D |
LB |
| Internal Volume (liters): |
50 |
44 |
30 |
17 |
2.4 |
0.4 |
| Contents (cubic feet): |
337 |
248 |
152 |
89 |
11 |
2.1 |
| Pressure @ 70°F (psig): |
2,400 |
2,200 |
2,000 |
2,000 |
2,000 |
1,800 |
| DOT Label: Green, NonCorrosive
Gas |
UN Number: UN 1006 |
|
| DOT Class:
2.2 |
Cylinder: Aluminum or steel alloy |
|
| Recommended OmniGas® Panels: Two-Valve Panel for
Inert Gases - Model No. 58PA200NB |
| Recommended Regulators: |
Single-Stage, Stainless Steel - Model 213 series
Single-Stage, Tied Diaphragm, Stainless Steel - Model 217 Series
Two-Stage, Brass - Model 218 series
Single-Stage, Brass - Model 2300 series |
| Shelf Life: 3 years |
|
| |
Order Argon toll-free: 866-704-6513 or