| DESCRIPTION: |
Arsine (AsH3) is a colorless, flammable,
highly toxic gas with a garlic-like odor, which acts as a nerve poison
and a strong hemolytic agent (i.e. arsine destroys red blood cells). Potentially
fatal if inhaled, arsine may form explosive mixtures with air. |
| APPLICATION: |
Arsine is used as an arsenic (N-type dopant) source
in chemical vapor deposition (CVD) and ion implantation processes.
Arsine is usually a minor component in mixtures. Arsine is also used in
the epitaxial deposition of gallium arsenide layers for the fabrication
of III-V devices. |
Order Arsine toll-free: 866-704-6513 or Contact
Us
|
| Critical Assay |
99.995% |
99.9995% |
| Nitrogen |
< 10 ppm |
< 1 ppm |
| Oxygen |
< 5 ppm |
< 1 ppm |
| Total Hydrocarbons (as CH4) |
< 1 ppm |
< 1 ppm |
| Carbon Dioxide + Carbon Monoxide |
< 2 ppm |
< 1 ppm |
| Water |
< 4 ppm |
< 1 ppm |
| Phosphine |
< 10 ppm |
< 2 ppm |
| Valve Material |
316L SS |
316L SS |
| Valve Design |
Tied Diaphragm |
Tied Diaphragm |
| CGA/DISS Connection |
350 |
350/632 |
Molecular Weight: |
77.95 |
Specific Volume: |
5.0 cf/lb @ NTP |
Boiling Point: |
-80.5°F @ 1 atm |
CAS No.: |
7784-42-1 |
Hazards: |
Inhalation and Flammability |
|
| Safety Data: |
LC50: 20 ppm
ACGIH - TLV: 0.05 ppm
NIOSH IDLH: (Ca) 5 ppm |
| Vapor Pressure Data: |
| |
130.5 psia @ 32°F
219.7 psia @ 70°F |
|
| ARSINE |
|
|
|
|
| Cylinder Data/Size |
C |
D |
LB |
|
| Internal Volume (liters): |
7 |
2.4 |
0.4 |
|
| Contents (lbs): |
5 |
0.36 |
0.1 |
|
| Contents (grams): |
2,267 |
164 |
45 |
|
| Pressure @ 70°F (psig): |
205 |
205 |
205 |
|
| RFO Size (inches): |
0.007 |
0.010 |
0.014 |
0.020 |
0.030 |
0.040 |
| Maximum Flow (scf/h): |
4 |
8.1 |
15.8 |
32.3 |
72.7 |
129.2 |
| Pressure (psig): |
219.7 |
|
|
|
|
|
| DOT Label: White, Inhalation
Hazard: Red, Flammable Gas |
UN Number:
UN 2188 |
| DOT Class:
2.3 |
Cylinder: Steel alloy |
| Recommended OmniGas®
Panels: Purgeable panel for toxic gases - Model
No. 58PA200SVA |
| Shelf Life: 2 years |
|
| |
