| DESCRIPTION: |
Boron Trichloride (BCI3) is
a colorless, toxic, nonflammable gas with a pungent and choking odor,
irritating to eyes, skin and mucous membranes. Boron Trichloride fumes in the presence
of moist air and hydrolyzes to form Hydrogen Chloride. Shipped as
a liquefied gas under its own vapor pressure (4.4 psig @ 70°F). |
| APPLICATION: |
Boron Trichloride is the preferred gas for plasma etching
of aluminum alloys, tungsten and tungsten silicide. |
Order Boron Trichloride toll-free: 866-704-6513 or Contact
Us
|
| Critical Assay |
99.9% |
99.99% |
99.999% |
| Nitrogen |
< 250 ppm |
< 40 ppm |
< 2 ppm |
| Oxygen |
< 100 ppm |
< 10 ppm |
< 1 ppm |
| Total Hydrocarbons (as CH4) |
< 50 ppm |
< 1 ppm |
< 0.5 ppm |
| Carbon Dioxide |
< 100 ppm |
< 5 ppm |
< 0.5 ppm |
| Hydrogen |
< 100 ppm |
< 50 ppm |
< 10 ppm |
| Chlorine |
< 100 ppm |
< 50 ppm |
< 2 ppm |
| Silicon |
< 10 ppm |
< 10 ppm |
< 3 ppm |
| Total Metals |
- |
< 1 ppmw |
< 0.7 ppmw |
| Iron |
- |
< 0.5 ppmw |
< 0.3 ppmw |
| Copper |
- |
< 0.5 ppmw |
< 0.1 ppmw |
| Nickel |
- |
< 0.5 ppmw |
< 0.1 ppmw |
| Chromium |
- |
< 0.5 ppmw |
< 0.1 ppmw |
| Manganese |
- |
< 0.5 ppmw |
< 0.1 ppmw |
| Other Metals (each) |
- |
- |
- |
| Valve Material |
316L SS |
316L SS |
316L SS |
| Valve Design |
Tied Diaphragm |
Tied Diaphragm |
Tied Diaphragm |
| CGA/DISS Connection |
660 |
660 |
660/634 |
Molecular Weight: |
117.17 |
| Specific Volume: |
3.3 cf/lb @ NTP |
Boiling Point: |
54.3°F @ 1atm |
CAS No.: |
10294-34-5 |
Hazards: |
Inhalation, Skin and Eye Contact |
|
| Safety Data: |
LC50: 2541 ppm |
| Vapor Pressure Data:
|
|
9.1 psia @ 30°F |
| |
19.1 psia @ 70°F |
|
| BORON TRICHLORIDE |
|
|
|
|
|
| Cylinder Data/Size |
A
|
B |
C |
D |
|
| Internal Volume (liters): |
44 |
17 |
7 |
2.4 |
|
| Contents (lbs): |
100 |
40 |
10 |
5 |
|
| Phase Break @ 70°F (lbs): |
0.62 |
0.24 |
0.1 |
0.03 |
|
| Pressure @ 70°F (psig): |
4.4 |
4.4 |
4.4 |
4.4 |
|
| RFO Size (inches): |
0.020 |
0.030 |
0.040 |
|
| Maximum Flow (scf/h): |
2.3 |
5.1 |
9.15 |
|
| Pressure (psia): |
19.1 |
|
|
| DOT Label: White, Inhalation
Hazard; B&W Corrosive Gas |
UN Number:
UN 1741 |
| DOT Class:
2.3 |
Cylinder: Steel Alloy |
| Recommended OmniGas® Panels: Purgable panel for
toxic gases - Model No.
58PA200SVA - H with Hastelloy® Regulator |
| Shelf Life: 2 years |
|
| |
