| DESCRIPTION: |
Boron Trifluoride (BF3) is
a colorless, toxic, corrosive, nonflammable gas with a pungent odor,
irritating to eyes, skin and mucous membranes. Boron Trifluoride fumes in the presence
of moist air and hydrolyzes to form Hydrogen Fluoride. Boron Trifluoride is normally
compressed and shipped at high pressures. |
| APPLICATION: |
Boron Trifluoride is a widely used gas for ion implantation
of the N-type dopant boron. B11 enriched Boron Trifluoride is used in
high-current implantation applications where shallow high-doping concentrations
of boron are required. |
Order Boron Trifluoride toll-free: 866-704-6513 or Contact
Us
|
| Critical Assay |
99.57% |
99.99% |
99.5% |
| Isotopic Purity |
- |
- |
99.0% |
| Nitrogen |
< 3,200 ppm |
< 15 ppm |
< 25 ppm |
| Oxygen |
< 800 ppm |
< 5 ppm |
< 25 ppm |
| Silcon Tetrafluoride |
< 300 ppm |
< 20 ppm |
- |
| Sulfur Dioxide |
< 20 ppm |
< 20 ppm |
< 25 ppm |
| Argon |
- |
- |
< 25 ppm |
| Carbon Dioxide |
- |
- |
< 25 ppm |
| Hydrogen Fluoride |
- |
- |
< 25 ppm |
| Valve Material |
316L SS |
316L SS |
316L SS |
| Valve Design |
Tied Diaphragm |
Tied Diaphragm |
Tied Diaphragm |
| CGA/DISS Connection |
330 |
330/642 |
330/642 |
Molecular Weight: |
67.81 |
| Specific Volume: |
5.6 cf/lb @ NTP |
Boiling Point: |
-147.8°F @ 1atm |
CAS No.: |
7637-07-02 |
Hazards: |
Inhalation, Skin and Eye Contact |
|
| Safety Data: |
LC50 Rat: 806 ppm |
| ACGIH Ceiling: 1 ppm |
| NIOSH IDLH: 25 ppm |
| Physical Properties Data:
|
|
Critical Temperature: 9.95°F |
| |
Critical Pressure: 723 psia |
|
| BORON TRIFLUORIDE |
|
|
|
|
| Cylinder Data/Size |
D |
LB |
|
|
| Internal Volume (liters): |
2.4 |
0.4 |
|
|
| Contents (lbs): |
1.2 |
0.2 |
|
|
| Contents (grams): |
545 |
90 |
|
|
| Pressure @ 70°F (psig): |
800 |
800 |
|
|
| RFO Size (inches): |
0.14 |
0.020 |
0.030 |
0.040 |
|
| Maximum Flow (scf/h): |
62.9 |
128.3 |
288.7 |
513.2 |
|
| Pressure (psig): |
814.7 |
|
|
| DOT Label: White, Inhalation
Hazard |
UN Number:
UN 1008 |
| DOT Class:
2.3 |
Cylinder: Steel alloy |
| Recommended OmniGas® Panels: Purgable panel for
toxic gases - Model No.
58PA200SVA - H with Hastelloy® Regulator |
| Shelf Life: 1 year |
|
| |
