| DESCRIPTION: |
Chlorine (Cl2) is a greenish-yellow,
toxic, oxidizing, nonflammable gas with a pungent odor, severely irritating
to eyes, skin and mucous membranes. Shipped as a liquefied gas under
its own vapor pressure (85 psig @ 70°F). |
| APPLICATION: |
Chlorine is used with boron trichloride or silicon
tetrachloride to enhance etching characteristics of aluminum etching.
Chlorine is also used with sulfur hexafluoride for etching titanium tungsten
structures and is combined with hydrogen bromide or hydrogen chloride
to etch polysilicon. |
Order Chlorine toll-free: 866-704-6513 or Contact
Us
|
| Critical Assay |
99.97% |
99.997% |
99.998% |
| Meets SEMI Specification |
- |
- |
SEMI C3.32-92 |
| Nitrogen |
< 100 ppm |
< 10 ppm |
< 5 ppm |
| Oxygen |
< 10 ppm |
< 2 ppm |
< 1 ppm |
| Total Hydrocarbons (as CH4) |
< 5 ppm |
< 0.2 ppm |
< 0.2 ppm |
| Carbon Dioxide |
< 200 ppm |
< 7 ppm |
< 7 ppm |
| Water |
< 5 ppm |
< 3 ppm |
< 1 ppm |
| Carbon Monoxide |
- |
- |
< 1 ppm |
| Total Metals |
- |
< 10 ppmw |
< 0.5 ppmw |
| Iron |
- |
- |
< 0.1 ppmw |
| Nickel |
- |
- |
< 0.05 ppmw |
| Chromium |
- |
- |
< 0.05 ppmw |
| Valve Material |
303 SS |
316L SS |
316L SS |
| Valve Design |
Packed |
Packed |
Tied Diaphragm |
| CGA/DISS Connection |
660 |
660 |
660/728 |
Molecular Weight: |
70.91 |
| Specific Volume: |
5.4 cf/lb @ NTP |
Boiling Point: |
-29.3°F @ 1atm |
CAS No.: |
7782-50-5 |
Hazards: |
Inhalation, Skin Contact, and Oxidizer |
| |
|
|
| Safety Data: |
LC50 Rat: 293 ppm |
| ACGIH - TLV: 0.5 ppm |
| ACGIH STEL: 1 ppm |
| NIOSH IDLH: 10 ppm |
| NIOSH - Ceiling: 0.5 ppm |
| Vapor Pressure Data:
|
|
53.4 psia @ 32°F |
| |
99.7 psia @ 70°F |
|
| CHLORINE |
|
|
|
|
|
|
| Cylinder Data/Size |
A |
B |
C |
D |
LB |
|
| Internal Volume (liters): |
44 |
17 |
7 |
2.4 |
0.4 |
|
| Contents (lbs): |
100 |
40 |
15 |
5 |
1 |
|
| Phase Break @ 70°F (lbs) |
1.93 |
0.76 |
0.3 |
0.1 |
0.02 |
|
| Pressure @ 70°F (psig): |
85 |
85 |
85 |
85 |
85 |
|
| RFO Size (inches): |
0.20 |
0.030 |
0.040 |
|
| Maximum Flow (scf/h): |
15.4 |
34.6 |
61.6 |
|
| Pressure (psig): |
99.7 |
|
|
| DOT Label: White, Inhalation
Hazard: B&W, Corrosive Gas |
UN Number:
UN 1017 |
| DOT Class:
2.3 |
Cylinder: Steel Alloy |
| Recommended OmniGas® Panels: Purgable panel for
corrosive gases - Model No. 58PA200SVA-H with Hastelloy®
Regulator - please inquire |
| Shelf Life: 2 years |
|
| |
