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Carbon Monoxide

CO

DESCRIPTION: Carbon Monoxide (CO) is a flammable, odorless, colorless, and toxic gas. Carbon Monoxide is shipped as a gas in steel cylinders at various pressures.

APPLICATION: Carbon Monoxide is used as an additive for selective etching of oxide films that are deposited over silicon nitride.

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CARBON MONOXIDE
GRADE CVD
Critical Assay 99.99%
Water < 5 ppm
Oxygen < 5 ppm
Nitrogen < 10 ppm
Hydrogen < 2 ppm
Carbon Dioxide < 15 ppm
Total Hydrocarbons (as CH4) < 2 ppm
Iron¹ < 0.5 ppm
Valve Material Brass/316L SS
Valve Design Tied Diaphragm
CGA/DISS Connection 350/724² 
¹In aluminum cylinders.
²DISS connection available using PCTFE gasket.

 

Molecular Weight:
28.01
Specific Volume:
13.8 cf/lb @ NTP
Boiling Point:
-312.7°F @ 1 atm
CAS No.:
630-08-0
Hazards:
Flammability and Chemical Asphyxiant
   
Safety Data: LC50: 3,760 ppm
PEL - TWA: 50 ppm
ACGIH - TLV: 25 ppm
NIOSH IDLH: 1,200 ppm
Vapor Pressure Data:
  Critical Temperture: -220.4°F
Critical Pressure: 507.4 psia

 

CARBON MONOXIDE            
Cylinder Data/Size KAL A AL C D LB
Internal Volume (liters): 49 44 30 7 2.4 0.4
Contents (cf): 198 177 120 27 9 106
Pressure @ 70°F (psig): 1,650 1,650 1,650 1,650 1,650 1,650
DOT Label: White, Inhalation Hazard; Red, Flammable Gas UN Number: UN 1016
DOT Class: 2.3 Cylinder: Aluminum or steel alloy
Recommended OmniGas® Panels: Two-valve panel for inert gases - Model No. 58PA200PNB
Shelf Life: 2 years

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