Scott Specialty Gases for semiconductor and electronic applications
About Scott Products Services Technology News What's New Locations Catalog Requests Contact Us Hot Links Site Map Home
  Pure Gases Gas Mixtures Equipment Tech Data  

Carbon Dioxide

CO2

DESCRIPTION: Carbon Dioxide (CO2) is a colorless, odorless, nonflammable gas with very low toxicity and slight acidity. Shipped at high pressure either pure or with Helium headspace, to maximize cleaning action.

APPLICATION: Carbon Dioxide is used for the oxidation of silicon. Carbon Dioxide is also used for surface cleaning by bombarding the contaminated surface with Carbon Dioxide snow.

semi Order Carbon Dioxide toll-free: 866-704-6513 or Contact Us

CARBON DIOXIDE
GRADE PRECISION CLEAN¹ CVD
Critical Assay 99.995% 99.999%
Argon < 5 ppm -
Hydrogen < 5 ppm < 5 ppm
Nitrogen < 20 ppm < 4 ppm
Oxygen < 2 ppm < 1 ppm
Carbon Monoxide < 5 ppm < 0.5 ppm
Methane < 2 ppm -
Water < 3 ppm < 1 ppm
Nonvolatile Organics (w/w)² < 0.1ppm -
Total Hydrocarbons - < 0.5 ppm
Valve Material 316L SS 316L SS
Valve Design³ Diaphragm Diaphragm
CGA/DISS Connection 320/716 320/716
Cylinder Treatment Aculife™ Aculife™
Cylinder Sizes Available AL,BL,CL,KAL A
¹Specifically manufactured for CO2 cleaning applications.
²When provided in returnable aluminum cylinders only.
³Specify if diptube is required. Helium headspace abalable with diptube.

semi MSDS Carbon Dioxide CO2.pdf

Molecular Weight:
44.01
Specific Volume:
8.76 cf/lb @ NTP
Boiling Point:
-109.2°F @ 1 atm
CAS No.:
124-38-9
Hazards:
High Pressure and Suffocation
   
Safety Data: PEL - TWA: 5,000 ppm
NIOSH STEL: 30,000 ppm
NIOSH IDLH: 40,000 ppm
Vapor Pressure Data:
  505.7 psia @ 32°F
852.7 psia @ 70°F

 

CARBON DIOXIDE          
Cylinder Data/Size A AL BL CL KAL
Internal Volume (liters): 44 30 16 6 46.47
Contents (lbs): 60 39 21 8 69
Phase Break (w/o He) @ 70°F (lbs): 10.35 6.82 3.61 1.38 11.27
Pressure @ 70°F (psia): 852 1,500-2,000* 1,500-2,000* 1,500-2,000* 1,500-2,000*
   
*(w/He and diptube)
DOT Label: Green, Nonflammable Gas UN Number: UN 1013
DOT Class: 2.2 Cylinder: Aluminum or steel alloy
Recommended OmniGas® Panels: Two-valve panel for inert gases - Model No. 58PA200PNB
Recommended Regulators: Single-Stage, Stainless Steel - Model 213 series
Single-Stage, Tied Diaphragm, Stainless Steel - Model 217 series
Single-Stage, Brass - Model 218 series
Shelf Life: 3 years

About Scott | Products | Services | Technology News | What's New
Locations | Catalog Request | Contact Us | Hot Links | Site Map | Home