| Diborane is only available as a mixture, typically using Argon,
Helium, Hydrogen, or Nitrogen as balance gases. Other balance gases
are available upon request. |
| DESCRIPTION: |
Diborane (B2H6)
is a colorless, toxic, flammable gas with a sickly sweet odor. |
| APPLICATION: |
Diborane is used as a boron (P-type dopant) source
in chemical vapor deposition (CVD) or ion implantation processes. |
Order Diborane toll-free: 866-704-6513 or Contact
Us
|
| Critical Assay |
99.998% |
| Carbon Dioxide |
< 5 ppm |
| Methane |
< 5 ppm |
| Nitrogen |
< 10 ppm |
| Oxygen |
< 1 ppm |
| Valve Material |
316L SS |
| Valve Design |
Tied Diaphragm |
| CGA/DISS Connection |
350/632 |
| *Analysis of Hydrogen or additional boranes are available
upon request. |
Molecular Weight: |
27.67 |
Specific Volume: |
13.98 cf/lb @ NTP |
Boiling Point: |
-134°F @ 1 atm |
CAS No.: |
19287-45-7 |
Hazards: |
Inhalation and Flammability |
| |
|
|
| Safety Data: |
LC50: 80 ppm
PEL - TWA: 0.1 ppm
ACGIH - TLV: 0.1 ppm |
| Physical Properties Data: |
| |
Critical Temperature: 62.1°F
Critical Pressure: 580.8 psia |
|
| DIBORANE |
|
|
| Cylinder Data |
|
|
| DOT Label: White, Inhalation Hazard;
Red, Flammable Gas |
UN Number: UN 1911 |
| DOT Class:
2.3 |
Cylinder: Steel Alloy |
|
| |
