| DESCRIPTION: |
Germane (GeH4) is a colorless,
highly toxic, flammable gas with a pungent odor, which may form explosive
mixtures with air. Germane is normally shipped as free gas at various pressures. |
| APPLICATION: |
Germane is used as germanium source in the chemical
vapor deposition (CVD) of germanium silicon heterostructures. |
Order Germane toll-free: 866-704-6513 or Contact
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|
| Critical Assay |
99.999% |
| Hydrogen |
< 50 ppm |
| Nitrogen |
< 2 ppm |
| Oxygen |
< 0.5 ppm |
| Methane |
< 1 ppm |
| Carbon Dioxide |
< 2 ppm |
| Carbon Monixide |
< 1 ppm |
| Digermane |
< 20 ppm |
| Trigermane |
< 1 ppm |
| Water |
< 1 ppm |
| Germoxanes |
< 5 ppm |
| Chlorogermanes |
< 5 ppm |
| Valve Material |
316L SS |
| Valve Design |
Tied Diaphragm |
| CGA/DISS Connection |
350/632 |
Molecular Weight: |
76.62 |
Specific Volume: |
5.05 cf/lb @ NTP |
Boiling Point: |
-127°F @ 1 atm |
CAS No.: |
7782-65-2 |
Hazards: |
Inhalation and Flammability |
| |
|
|
| Safety Data: |
LC50: 622 ppm
ACGIH - TLV: 0.2 ppm |
| Physical Properties Data: |
| |
Critical Temperture: 94.7 °F
Critical Pressure: 805.3 psia |
|
| GERMANE |
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|
| Cylinder Data/Size |
B |
CL |
LB |
|
|
|
| Internal Volume (liters): |
17 |
6 |
0.4 |
|
|
|
| Contents (grams): |
680 |
200 |
20 |
|
|
|
| Pressure @ 70°F (psig): |
160 |
132 |
160 |
|
|
|
| RFO Size (inches): |
0.007 |
0.010 |
0.014 |
0.020 |
0.040 |
|
| Maximum Flow (scf/h): |
3.2 |
6.5 |
12.7 |
25.9 |
103.5 |
|
| Pressure @ 70°F (psia): |
174.7 |
|
|
|
| DOT Label: White, Inhalation
Hazard; Red, Flammable Gas |
UN Number: UN 2192 |
| DOT Class:
2.3 |
Cylinder: Nickel Plated or Stainless |
| Recommended OmniGas® Panels: Purgeable panel for
toxic gases - Model No.
58PA200SVA |
| Shelf Life: 1 year |
|
| |
