Halocarbon 116 - HEXAFLUOROETHANE
|
C2F6 |
| DESCRIPTION: |
Halocarbon 116 (Hexafluoroethane)(C2F6)
is a colorless, nontoxic, noncorrosive, nonflammable gas which is
extremely stable. When heated to decomposition, toxic byproducts are
formed. Contact with liquid may cause frostbite. Shipped as a liquefied
gas under its own vapor pressure (415 psig @ 70 °F). |
| APPLICATION: |
Halocarbon 116 is used for plasma etching of silicon
and silicon compounds, and cleaning of process chambers. |
Order Halocarbon 116 toll-free: 866-704-6513 or Contact
Us
|
| Critical Assay |
99.9% |
99.99% |
99.999% |
| Nitrogen |
< 300 ppm |
< 40 ppm |
< 8 ppm |
| Oxygen |
< 100 ppm |
< 10 ppm |
< 2 ppm |
| Total Hydrocarbons (as CH4) |
< 50 ppm |
< 5 ppm |
< 1 ppm |
| Carbon Monoxide |
< 50 ppm |
< 5 ppm |
< 1 ppm |
| Carbon Dioxide |
< 50 ppm |
< 5 ppm |
< 1 ppm |
| Water |
< 20 ppm |
< 10 ppm |
< 1 ppm |
| Acidity as HF |
< 0.1 ppmw |
< 0.1 ppmw |
< 0.1 ppmw |
| Valve Material |
Stainless Steel |
Stainless Steel |
Stainless Steel |
| Valve Design |
Diaphragm |
Diaphragm |
Diaphragm |
| CGA/DISS Connection |
660, 320 |
660, 320 |
660, 320/716 |
Molecular Weight: |
138.01 |
Specific Volume: |
2.8 cf/lb @ NTP |
Boiling Point: |
-108.8°F @ 1 atm |
CAS No.: |
75-16-4 |
Hazards: |
High Pressure and Suffocation |
|
| Safety Data: |
Simple Ashyxiant |
| Vapor Pressure Data: |
| |
Critical Temperature: 68 °F
Critical Pressure: 432 psia |
|
| HALOCARBON 116 |
|
|
|
|
|
| Cylinder Data/Size |
A |
B |
LB |
|
|
| Internal Volume (liters): |
44 |
17 |
0.4 |
|
|
| Contents (lbs): |
95 |
22 |
0.5 |
|
|
| Pressure @ 70°F (psig): |
415 |
415 |
415 |
|
|
| DOT Label: Green, Nonflammable
Gas |
UN Number: UN 2193 |
|
| DOT Class:
2.2 |
Cylinder: Steel alloy |
|
Recommended Regulators:
|
Single-Stage, Stainless Steel - Model 213 series
Single-Stage, Brass - Model 2300 series |
| Shelf Life: 3 years |
|
| |
