Halocarbon 125 - PENTAFLUOROETHANE
|
C2HF5 |
| DESCRIPTION: |
Halocarbon 125 (Pentafluoroethane)(C2HF5)is
a clear, colorless, nonflammable gas. Shipped as a liquefied gas under
its own vapor pressure (166 psig @ 70 °F). |
| APPLICATION: |
Halocarbon 125, or pentafluoroethane, is a high-purity
hydroflurocarbon used to selectively etch silicon-based dielectric
films. |
Order Halocarbon 125 toll-free: 866-704-6513 or Contact
Us
|
| Critical Assay |
99.99% |
| Nitrogen |
< 65 ppm |
| Oxygen |
< 15 ppm |
| Water |
< 10 ppmw |
| Acidity as HF |
< 0.1 ppmw |
| Valve Material |
316L SS |
| Valve Design |
Tied Diaphragm |
| CGA/DISS Connection |
660/716 |
Molecular Weight: |
120.03 |
Specific Volume: |
3.17 cf/lb @ NTP |
Boiling Point: |
-54.4°F @ 1 atm |
CAS No.: |
354-33-6 |
Hazards: |
High Pressure and Suffocation |
|
| Safety Data: |
Simple Ashyxiant |
| Vapor Pressure Data: |
| |
99.7 psia @ 33 °F
181.1 psia @ 70°F |
|
| HALOCARBON 125 |
|
|
|
|
|
| Cylinder Data/Size |
A |
AL |
B |
C |
LB |
| Internal Volume (liters): |
44 |
30 |
17 |
7 |
0.4 |
| Contents (lbs): |
90 |
60 |
35 |
14 |
0.8 |
| Phase Break @ 70°F (lbs); |
6.0 |
4.0 |
2.4 |
0.9 |
0.06 |
| Pressure @ 70°F (psig): |
166 |
166 |
166 |
166 |
166 |
| DOT Label: Green, Nonflammable
Gas |
UN Number: UN 3220 |
|
| DOT Class:
2.2 |
Cylinder: Steel alloy |
|
Recommended Regulators:
|
Single-Stage, Tied Diaphragm, Stainless Steel - Model 217 series |
| Shelf Life: 3 years |
|
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