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Halocarbon 134a 1,1,1,2 - TETRAFLUOROETHANE

C2H2F4

DESCRIPTION: Halocarbon 134a (1,1,1,2-Tetrafluoroethane)(C2H2F4) is a colorless, nonflammable, and noncorrosive gas. Decomposes at high temperatures to toxic substances. Shipped as a liquefied gas under its own vapor pressure (71 psig @ 70° F).

APPLICATION: Halocarbon 134a, or tetrafluoroethane, is a high-purity hyrdrofluorocarbon used in a variety of thin-film etching applications.

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HALOCARBON 134a
GRADE ELECTRONIC
Critical Assay 99.95%
Water < 10 ppm
Oxygen < 10 ppm
Nitrogen < 40 ppm
Acidity as HF < 0.1 ppm
Valve Material 316L SS
Valve Design Tied Diaphragm
CGA/DISS Connection 660/716

semi MSDS 1,1,1,2-Tetrafluoroethane C2H2F4.pdf

Molecular Weight:
102.0
Specific Volume:
3.17 cf/lb @ NTP
Boiling Point:
-15.7°F @ 1 atm
CAS No.:
811-97-2
Hazards:
High Pressure and Suffocation
Safety Data: Simple Ashyxiant
Vapor Pressure Data:
  13.3 psia @ 32°F
85.9 psia @ 70°F

 

HALOCARBON 134a          
Cylinder Data/Size A B C D LB
Internal Volume (liters): 44 17 7 2.4 0.4
Contents (lbs): 115 44 18 5 1
Phase Break @ 70°F(lbs); 2.9 1.1 0.5 0.15 0.03
Pressure @ 70°F (psig): 71 71 71 71 71
DOT Label: Green, Nonflammable Gas UN Number: UN 3159  
DOT Class: 2.2 Cylinder: Steel alloy  
Recommended OmniGas® Panels: Purgeable panel for gases - Model No. 58PA200PNB
Recommended Regulators:
Single-Stage, Tied Diaphragm, Stainless Steel - Model 217 series
Shelf Life: 3 years

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