Halocarbon 14 - TETRAFLUOROMETHANE |
CF4 |
| DESCRIPTION: |
Halocarbon 14 (Tetrafluoromethane) (CF4)
is a colorless, nontoxic, nonflammable, noncorrosive gas with a slight
ether-like odor. Halocarbon 14 is normally compressed and shipped at high pressure. |
| APPLICATION: |
Halocarbon 14 is combined with oxygen to etch polysilicon,
silicon dioxide and silicon nitride, as well as certain metals and
metal silicides. Halocarbon 14 can be combined with Halocarbon 116 or used alone
to clean wafers and chambers. |
Order Halocarbon 14 toll-free: 866-704-6513 or Contact
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|
| Critical Assay |
99.99% |
99.997% |
| Meets SEMI Specification |
SEMI C3.21-90 |
SEMI C3.12-90 |
| Nitrogen |
< 200 ppm |
< 16 ppm |
| Oxygen |
< 50 ppm |
< 4 ppm |
| Carbon Dioxide |
< 5 ppm |
< 1 ppm |
| Water |
< 1 ppm |
< 1 ppm |
| Carbon Monoxide |
< 5 ppm |
< 1 ppm |
| Acidity as HF |
< 0.1 ppmw |
< 0.1 ppmw |
| Sulfur Hexafluoride |
< 1 ppm |
< 1 ppm |
| Valve Material |
Stainless Steel |
316L SS |
| Valve Design |
Packed |
Packed |
| CGA/DISS Connection |
580/320 |
580 or 320/716 |
Molecular Weight: |
88.01 |
Specific Volume: |
4.39 cf/lb @ NTP |
Boiling Point: |
-198.4°F @ 1 atm |
CAS No.: |
75-73-0 |
Hazards: |
High Pressure and Suffocation |
|
| Safety Data: |
Simple Ashyxiant |
| Physical Properties Data: |
| |
Critical Termperature: - 50.2 °F
Critical Pressure: 543.2 psia |
|
| HALOCARBON 14 |
|
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|
| Cylinder Data/Size |
A |
AL |
B |
BL |
C |
| Internal Volume (liters): |
44 |
30 |
17 |
16 |
7 |
| Contents (lbs): |
70 |
47 |
24 |
24 |
10 |
| Pressure @ 70°F (psig): |
2,000 |
2,000 |
2,000 |
2,000 |
2,000 |
| DOT Label: Green, Nonflammable
Gas |
UN Number: UN 1982 |
|
| DOT Class:
2.2 |
Cylinder: Aluminum or steel alloy |
|
| Recommended Regulators: |
Single-Stage, Stainless Steel - Model 213 series
Single-Stage, Tied Diaphragm, Stainless Steel - Model 217 series
Two-Stage, Brass - Model 218 series |
| Shelf Life: 3 years |
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