Halocarbon 218 - PERFLUOROPROPNE
|
C3F8 |
| DESCRIPTION: |
Halocarbon 218 (Perfluoropropane)(C3F8)
is a colorless, nonflammable, nontoxic gas which is relatively stable
and has a faintly sweet odor. Halocarbon 218 is shipped as a liquefied gas under
its own vapor pressure (100 psig @ 70° F). |
| APPLICATION: |
Halocarbon 218 has the highest ratio of fluorine-to-carbon
and is used for plasma etching. When Halocarbon 218 is exposed to the RF field
generated in the etch process, a gas plasma is produced that etches
silicon dioxide or silicon nitride with excellent selectivity. |
Order Halocarbon 218 toll-free: 866-704-6513 or Contact
Us
|
| Critical Assay |
99.96% |
| Water |
< 75 ppm |
| Carbon Monoxide |
< 20 ppm |
| Carbon Dioxide |
< 17 ppm |
| Oxygen + Nitrogen |
< 30 ppm |
| Acidity as HF |
< 0.1 ppm |
| Valve Material |
316L SS |
| Valve Design |
Diaphragm |
| CGA/DISS Connection |
660/716 |
Molecular Weight: |
188.02 |
Specific Volume: |
2.02 cf/lb @ NTP |
Boiling Point: |
-34.1°F @ 1 atm |
CAS No.: |
76-19-7 |
Hazards: |
High Pressure and Suffocation |
|
| Safety Data: |
Simple Ashyxiant |
| Vapor Pressure Data: |
| |
60.9 psia @ 32°F
114.7 psia @ 70°F |
|
| HALOCARBON 218 |
|
|
|
|
|
| Cylinder Data/Size |
A |
B |
C |
D |
|
| Internal Volume (liters): |
44 |
17 |
7 |
2.4 |
|
| Contents (lbs): |
95 |
38 |
15 |
5 |
|
| Phase Break @ 70°F (lbs): |
6.0 |
2.4 |
0.9 |
0.14 |
|
| Pressure @ 70°F (psig): |
100 |
100 |
100 |
100 |
|
| RFO Size (inches): |
0.007 |
0.010 |
0.020 |
0.040 |
|
| Maximum Flow (scf/h): |
1.3 |
2.7 |
10.9 |
43.4 |
|
| Pressure @ 70°F (psia): |
114.7 |
|
|
|
|
| DOT Label: Green, Nonflammable
Gas |
UN Number: UN 2424 |
|
| DOT Class:
2.2 |
Cylinder: Steel alloy |
|
| Recommended OmniGas®
Panels: Purgeable panel for corrosive gases - Model No.
58PA200S - please inquire |
Recommended Regulators:
|
Single-Stage, Tied Diaphragm, Stainless Steel - Model 217 series |
| Shelf Life: 3 years |
|
| |
