Halocarbon 23 - TRIFLUOROMETHANE |
CHF3 |
| DESCRIPTION: |
Halocarbon 23 (Trifluoromethane)(CHF3) is
a colorless, nontoxic, nonflammable gas with a slightly ethereal odor.
Contact with liquid may cause frostbite. Shipped as a liquefied gas
under its own vapor pressure (635 psig @ 70°F). |
| APPLICATION: |
Halocarbon 23 is often used in combination with Halocarbon
14 and Halocarbon 116 to improve etch rate, selectivity and uniformity
in etching. |
Order Halocarbon 23 toll-free: 866-704-6513 or Contact
Us
|
| Critical Assay |
99.9% |
99.99% |
99.996% |
| Nitrogen |
< 400 ppm |
< 50 ppm |
< 15 ppm |
| Oxygen |
< 100 ppm |
< 10 ppm |
< 5 ppm |
| Acidity as HF |
< 0.1 ppmw |
< 0.1 ppmw |
< 0.1 ppmw |
| Carbon Dioxide |
- |
< 10 ppm |
< 10 ppm |
| Water |
- |
< 5 ppm |
< 5 ppm |
| Valve Material |
Stainless Steel |
Stainless Steel |
Stainless Steel |
| Valve Design |
Diaphragm |
Diaphragm |
Diaphragm |
| CGA/DISS Connection |
660, 320 |
660, 320/716 |
660, 320/716 |
Molecular Weight: |
70.01 |
Specific Volume: |
5.5 cf/lb @ NTP |
Boiling Point: |
-115.6°F @ 1 atm |
CAS No.: |
75-46-7 |
Hazards: |
High Pressure and Suffocation |
|
| Safety Data: |
Simple Ashyxiant |
| Physical Properties Data: |
| |
362.6 psia @ 32°F
649.7 psia @ 70 °F |
|
| HALOCARBON 23 |
|
|
|
|
|
| Cylinder Data/Size |
A |
B |
C |
LB |
|
| Internal Volume (liters): |
44 |
17 |
7 |
0.4 |
|
| Contents (lbs): |
70 |
20 |
8 |
0.75 |
|
| Phase Break @ 70°F (lbs): |
12.5 |
4.9 |
1.9 |
0.12 |
|
| Pressure @ 70°F (psig): |
635 |
635 |
635 |
635 |
|
| DOT Label: Green, Nonflammable
Gas |
UN Number: UN 1984 |
|
| DOT Class:
2.2 |
Cylinder: Steel alloy |
|
| Recommended Regulators: |
Single-Stage, Stainless Steel - Model 213 series
Single-Stage, Tied Diaphragm, Stainless Steel - Model 217 series
Two-Stage, Brass - Model 218 series
Single-Stage, Brass - Model 2300 series |
| Shelf Life: 3 years |
|
| |
