Halocarbon 32 DIFLUOROMETHANE |
CH2F2 |
| DESCRIPTION: |
Halocarbon 32 (Difluoromethane)(CH2F2)
is a colorless, flammable gas with a slight ether-like odor. Halocarbon 32 is
shipped as a liquefied gas under its own vapor pressure (207 psig
@ 70°F). |
| APPLICATION: |
Halocarbon 32 is used for plasma etching and disassociates
into reactive fluoride ions in the presence of an RF field. |
Order Halocarbon 32 toll-free: 866-704-6513 or Contact
Us
|
| Critical Assay |
99.99% |
| Nitrogen |
< 40 ppm |
| Oxygen |
< 10 ppm |
| Water |
< 10 ppmw |
| Acidity as HF |
< 0.1 ppmw |
| Valve Material |
316L SS |
| Valve Design |
Tied Diaphragm |
| CGA/DISS Connection |
350/724 |
Molecular Weight: |
52.02 |
Specific Volume: |
7.19 cf/lb @ NTP |
Boiling Point: |
-61°F @ 1 atm |
CAS No.: |
75-10-5 |
Hazards: |
Inhalation, Skin Contact and Flammability |
|
| Safety Data: |
LC50: 152,000 ppm |
| Vapor Pressure Data: |
| |
114.1 psia @ 32°F
221.4 psia @ 70 °F |
|
| HALOCARBON 32 |
|
|
|
|
|
| Cylinder Data/Size |
A |
B |
C |
D |
LB |
| Internal Volume (liters): |
44 |
17 |
7 |
2.4 |
0.4 |
| Contents (lbs): |
60 |
25 |
15 |
4 |
0.8 |
| Phase Break @ 70°F (lbs): |
3.2 |
1.3 |
0.5 |
0.16 |
0.03 |
| Pressure @ 70°F (psig): |
207 |
207 |
207 |
207 |
207 |
| DOT Label: Red, Flammable
Gas |
UN Number: UN 3252 |
|
| DOT Class:
2.1 |
Cylinder: Steel alloy |
|
Recommended Regulators: Single-Stage, Tied Diaphragm,
Stainless Steel - Model 217 or 217CP (with cross purg) series
NOTE: Due to flammability, do not use a regulator without purge
capability. |
| Shelf Life: 3 years |
|
| |
