Halocarbon 41 - METHYL
FLUORIDE |
CH3F |
| DESCRIPTION: |
Halocarbon 41 (Methyl Fluoride)(CH3F)
is a colorless, flammable gas. Haolcarbon 41 is shipped as a liquefied gas under
its own vapor pressure (538 psig @ 70 °F). |
| APPLICATION: |
Halocarbon 41 disassociates into reactive fluoride
ions in the presence of an RF field. The resulting ions react with
and etch silicon compound films. |
Order Halocarbon 41 toll-free: 866-704-6513 or Contact
Us
|
| Critical Assay |
99.9% |
99.99% |
| Nitrogen |
< 400 ppm |
< 80 ppm |
| Oxygen |
< 100 ppm |
< 20 ppm |
| Water |
< 20 ppm |
< 10 ppm |
| Valve Material |
316L SS |
316L SS |
| Valve Design |
Tied Diaphragm |
Tied Diaphragm |
| CGA/DISS Connection |
350/724 |
350/724 |
Molecular Weight: |
34.03 |
Specific Volume: |
11.36 cf/lb @ NTP |
Boiling Point: |
-109.2°F @ 1 atm |
CAS No.: |
593-53-3 |
Hazards: |
High Pressure and Flammability |
|
| Safety Data: |
Simple Ashyxiant |
| Vapor Pressure Data: |
| |
275.6 psia @ 32°F
552.7 psia @ 70 °F |
|
| HALOCARBON 41 |
|
|
|
|
|
| Cylinder Data/Size |
A |
B |
C |
D |
|
| Internal Volume (liters): |
44 |
17 |
7 |
2.4 |
|
| Contents (lbs): |
16 |
6 |
3 |
0.9 |
|
| Phase Break @ 70°F (lbs): |
5.1 |
2.0 |
0.8 |
0.26 |
|
| Pressure @ 70°F (psig): |
538 |
538 |
538 |
538 |
|
| DOT Label: Red, Flammable
Gas |
UN Number: UN 2454 |
|
| DOT Class:
2.1 |
Cylinder: Steel alloy |
|
Recommended Regulators: Single-Stage, Tied Diaphragm,
Stainless Steel - Model 217 or 217CP (with cross purg) series
NOTE: Due to flammability, do not use a regulator without purge
capability. |
| Shelf Life: 3 years |
|
| |
