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Halocarbon c-318 - OCTAFLUOROCYCLOBUTANE

C4F8
DESCRIPTION: Halocarbon c-318 (octafluorocyclobutane)(C4F8) is a colorless, nonflammable, nontoxic, odorless gas. Halocarbon c-318 is shipped as a liquefied gas under its own vapor pressure (25 psig @ 70 °F).

APPLICATION: Halocarbon c-318 is used for plasma etching. When Halocarbon c-318 is exposed to the RF field generated in the etch process, a gas plasma is produced that will etch silicon compounds with excellent selectivity.

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HALOCARBON c-318
GRADE ELECTRONIC VLSI ETCHANT ZYRON 8020
Critical Assay 99.9% 99.995% 99.998% 99.9%
Nitrogen < 750 ppm < 24 ppm < 8 ppm -
Oxygen < 150 ppm < 6 ppm < 2 ppm -
Air (N2 + O2 + CO + CO2) - - - < 300 ppm
Water < 80 ppm < 10 ppm < 3 ppm < 10 ppm
Tetrafluoromethane - < 10 ppm < 1 ppm -
Organic Impurities - - - < 1000 ppm
Acidity as HF - - < 0.5 ppm -
Valve Material 316L SS 316L SS 316L SS 316L SS
Valve Design Diaphragm Diaphragm Diaphragm Diaphragm
CGA/DISS Connection 660/716 660/716 660/716 660/716

 

Molecular Weight:
 200.03
Specific Volume:
 1.85 cf/lb @ NTP
Boiling Point:
 21.5°F @ 1 atm
CAS No.:
 115-25-3
Hazards:
 High Pressure and Suffocation
Safety Data: Simple Ashyxiant
Vapor Pressure Data:
  17.4 psia @ 32°F
39.7 psia @ 70°F

 

HALOCARBON c-318          
Cylinder Data/Size A B C D LB
Internal Volume (liters): 44 17 7 2.4 0.4
Contents (lbs): 85 33 13 4 0.7
Phase Break @ 70°F (lbs): 2.3 0.9 0.4 0.1 0.02
Pressure @ 70°F (psig): 25 25 25 25 25
RFO Size (inches): 0.007 0.010 0.020 0.040  
Maximum Flow (scf/h): 0.5 0.9 3.6 14.6  
Pressure @ 70°F (psia): 39.7        
DOT Label: Green, Nonflammable Gas UN Number: UN 1976  
DOT Class: 2.2 Cylinder: Steel alloy  
Recommended OmniGas® Panels: Purgeable panel for gases - Model No. 58PA200PNB
Recommended Regulators:
Single-Stage, Tied Diaphragm, Stainless Steel - Model 217 series
Shelf Life: 3 years

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