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Hydrogen Bromide

HBr

DESCRIPTION: Hydrogen Bromide (HBr) is a colorless, toxic, corrosive, nonflammable gas with a sharp, penetrating, suffocating odor, severely irritating to the upper respiratory tract and corrosive to eyes, skin and mucous membranes. Hydrogen Bromide is heavier than air and has a great affinity for water.

APPLICATION: Hydrogen Bromide is used in combination with hydrogen chloride and chlorine for plasma etching of polysilicon.

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HYDROGEN BROMIDE
GRADE ELECTRONIC VLSI SIGMA 3+
Critical Assay 99.95% 99.995% 99.9995%
Nitrogen < 320 ppm <13 ppm < 2 ppm
Oxygen < 80 ppm < 6 ppm < 1 ppm
Total Hydrocarbons (as CH4) - < 5 ppm < 0.5 ppm
Carbon Dioxide < 10 ppm < 8 ppm < 1 ppm
Water < 5 ppm < 3 ppm < 1 ppm
Carbon Monoxide < 10 ppm < 2 ppm < 1 ppm
Total Metals - < 10 ppmw < 30 ppbw
Iron - < 10 ppmw < 10ppbw
Nickel - - < 1 ppbw
Chromium - - < 1 ppbw
Cooper - - < 1ppbw
Manganese - - < 1ppbw
Sodium - - < 5ppbw
Calcium - - < 5ppbw
Zinc - - < 1ppbw
Palladium - - < 1 ppbw
Lead - - < 1ppbw
Valve Material 316L SS 316L SS Hastelloy® C
Valve Design Tied Diaphragm Tied Diaphragm Tied Diaphragm
CGA/DISS Connection 330 330/634 330/634

semi MSDS Hydrogen Bromide HBr.pdf

Molecular Weight: 80.91 Hazard: Inhalation and Skin Contact Vapor Pressure Data:
Specific Volume: 4.8 cf/lb @ NTP Safety Data: LC50 Rat: 2,860 ppm
ACGIH - TLV ceiling: 3 ppm
PEL-TWA: 3 ppm
NIOSH IDLH: 30 ppm
186.1 psia @ 32°F
341.7 psia @ 70°F
Boiling Point: -88.1°F @ 1 atm
CAS No.: 10035-10-6

 

HYDROGEN BROMIDE        
Cylinder Data/Size A B C D
Internal Volume (liters): 44 17 7 2.4
Contents (lbs): 100 40 10 3
Phase Break @ 70°F (lbs): 7.51 2.96 1.16 0.39
Pressure @ 70°F (psig): 327 327 327 327
RFO Size (inches): 0.020 0.030 0.040  
Maximum Flow (scf/h): 48.3 108.7 193.2  
Pressure @ 70°F (psig): 341.7 341.7 341.7  
DOT Label: White, Inhalation Hazard: B&W, Corrosive Gas UN Number: UN 1048  
DOT Class: 2.3 Cylinder: Nickel-plated  
Recommended OmniGas® Panels: Purgeable panel for corrosive gases - Model No. 58PA200SVA-H with Hastelloy® Regulator - please inquire
Shelf Life: 2 years

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