| DESCRIPTION: |
Hydrogen Chloride (HCl) is a colorless, toxic, corrosive,
nonflammable gas with a sharp, suffocating odor, severely irritating
to the upper respiratory tract and corrosive to eyes, skin and mucous
membranes. Hydrogen Chloride is heavier than air, fumes in moist air and has a great
affinity for water. Shipped as a liquefied gas under its own vapor
pressure (605 psig @ 70° F). |
| APPLICATION: |
Hydrogen Chloride is used for plasma and thermal etching
of silicon and gallium arsenide water surfaces prior to epitaxial
silicon and gallium arsenide growth. Hydrogen Chloride is also used as an additive
to polysilicon etching. |
Order Hydrogen Chloride toll-free: 866-704-6513 or Contact
Us
|
| Critical Assay |
99.995% |
99.999% |
99.999% |
| Nitrogen |
< 16 ppm |
< 2 ppm |
< 2 ppm |
| Oxygen |
< 5 ppm (+Ar) |
< 1 ppm |
< 1 ppm |
| Total Hydrocarbons (as CH4) |
< 5 ppm |
< 1 ppm |
< 1 ppm |
| Carbon Dioxide |
< 10 ppm |
< 8 ppm |
< 5 ppm |
| Water |
< 10 ppm |
< 3 ppm |
< 1 ppm |
| Hydrogen |
- |
- |
< 10 ppm |
| Total Metals |
- |
< 10 ppmw |
< 0.5 ppmw |
| Iron |
- |
- |
< 0.1 ppmw |
| Nickel |
- |
- |
< 0.05 ppmw |
| Chromium |
- |
- |
< 0.05 ppmw |
| Calcium |
- |
- |
< 0.01 ppmw |
| Valve Material |
316L SS |
316L SS |
316L SS |
| Valve Design |
Tied Diaphragm |
Tied Diaphragm |
Tied Diaphragm |
| CGA/DISS Connection |
330 |
330 |
330/634 |
| Molecular Weight: |
36.46 |
Hazard: Inhalation and Skin Contact |
Vapor Pressure Data: |
| Specific Volume: |
10.6 cf/lb @ NTP |
Safety Data: |
LC50 Rat: 3,120 ppm
ACGIH - Ceiling: 2 ppm
NIOSH IDLH: 100 ppm
OSHA Ceiling: 5 ppm |
376.3 psia @ 32°F
619.7 psia @ 70°F |
| Boiling Point: |
-121.1°F @ 1 atm |
| CAS No.: |
7647-01-0 |
| HYDROGEN CHLORIDE |
|
|
|
|
| Cylinder Data/Size |
A |
B |
C |
D |
| Internal Volume (liters): |
44 |
17 |
7 |
2.4 |
| Contents (lbs): |
60 |
20 |
5 |
3 |
| Phase Break @ 70°F (lbs): |
6.17 |
2.43 |
0.96 |
0.32 |
| Pressure @ 70°F (psig): |
605 |
605 |
605 |
605 |
| RFO Size (inches): |
0.020 |
0.030 |
0.040 |
|
| Maximum Flow (scf/h): |
134.9 |
303.4 |
539.5 |
|
| Pressure @ 70°F (psig): |
619.7 |
|
|
|
| DOT Label: White, Inhalation
Hazard: B&W, Corrosive Gas |
UN Number: UN 1050 |
|
| DOT Class:
2.3 |
Cylinder: Steel Alloy |
|
| Recommended OmniGas®
Panels: Purgeable panel for corrosive gases - Model No.
58PA200SVA-H with Hastelloy® Regulator - please
inquire |
| Shelf Life: 2 years |
|
| |
