| DESCRIPTION: |
Helium (He) is a colorless, odorless,
nontoxic, nonflammable, nonreactive inert gas which acts as a simple
asphyxiant by displacing air. Helium is normally compressed and shipped
at high pressure. |
| APPLICATION: |
Helium is used in purging, annealing, sputtering, leak
checking and etching applications. Helium is also used for back-side temperature
control to maintain uniform wafer temperature during critical deposition
processes. |
Order Helium toll-free: 866-704-6513 or Contact
Us
|
| Critical Assay |
99.999% |
99.9995% |
99.9999% |
| MEETS SEMI SPECIFICATION |
- |
- |
SEMI C3.20-92 |
| Nitrogen |
< 5 ppm |
< 3 ppm |
< 1 ppm |
| Oxygen |
< 2 ppm |
< 1 ppm |
< 1 ppm |
| Total Hydrocarbons (as CH4) |
< 1 ppm |
< 0.5 ppm |
< 0.1 ppm |
| Carbon Dioxide + Carbon Monoxide |
< 1 ppm |
< 0.5 ppm |
< 0.2 ppm |
| Water |
< 2 ppm |
< 1 ppm |
< 0.2 ppm |
| Valve Material |
Brass |
Brass |
316L SS |
| Valve Design |
Diaphragm |
Diaphragm |
Diaphragm |
| CGA/DISS Connection |
580 |
580 |
580/718 |
Molecular Weight: |
4.0 |
Specific Volume: |
96.7 cf/lb @ NTP |
Boiling Point: |
-452.1°F @ 1 atm |
CAS No.: |
7440-59-7 |
Hazards: |
High Pressure and Suffocation |
|
| Safety Data: |
Simple Ashyxiant |
| Physical Properties Data: |
| |
Critical Temperature: -450.3 °F
Critical Pressure: 33.2 psia |
|
| HELIUM |
|
|
|
|
|
| Cylinder Data/Size |
K |
A |
AL |
B |
C |
| Internal Volume (liters): |
50 |
44 |
30 |
17 |
7 |
| Contents (cubic feet): |
292 |
218 |
134 |
78 |
31 |
| Pressure @ 70°F (psig): |
2,400 |
2,200 |
2,000 |
2,000 |
2,000 |
| DOT Label: Green, Nonflammable
Gas |
UN Number: UN 1046 |
|
| DOT Class:
2.2 |
Cylinder: Steel alloy |
|
Recommended Regulators:
|
Single-Stage, Stainless Steel - Model 213 series
Single-Stage, Tied Diaphragm, Stainless Steel - Model 217 series
Two-Stage, Brass - Model 218 series |
| Shelf Life: 3 years |
|
| |
