| DESCRIPTION: |
Hydrogen (H2) is a colorless,
odorless, flammable gas which may ignite spontaneously and burn with
a colorless flame. Hydrogen is the lightest gas known and it is normally
compressed and shipped at high pressure. |
| APPLICATION: |
Hydrogen is used as a reactant gas with trichlorosilane
to form epitaxial silicon. Thermal oxides are grown using H2O
produced from the combustion of high-purity hydrogen and oxygen. Hydrogen
is used as a reducing gas to prevent formation of silicon dioxides
as an impurity in the epitaxial silicon layer. Hydrogen is also used
in doping gas mixtures that are used in sensitive chemical vapor deposition
(CVD) applications. |
Order Hydrogen toll-free: 866-704-6513 or Contact
Us
|
| Critical Assay |
99.999% |
99.9995% |
99.9999% |
| Meets SEMI Specification |
- |
- |
SEMI C3.19-93 |
| Nitrogen |
< 5 ppm |
< 2 ppm |
< 0.5 ppm |
| Oxygen |
< 2 ppm |
< 1 ppm |
< 0.5 ppm |
| Ttotal Hydrocarbons (as CH4) |
- |
< 1 ppm |
< 0.1 ppm |
| Carbon Dioxide + Carbon Monoxide |
- |
< 2 ppm |
< 0.1 ppm |
| Water |
< 4 ppm |
< 3 ppm |
< 0.5 ppm |
| Valve Material |
Brass |
Brass |
316L SS |
| Valve Design |
Diaphragm |
Diaphragm |
Diaphragm |
| CGA/DISS Connection |
350 |
350 |
350/724 |
Molecular Weight: |
2.02 |
Specific Volume: |
192 cf/lb @ NTP |
Boiling Point: |
-423°F @ 1 atm |
CAS No.: |
1333-74-0 |
Hazards: |
High Pressure and Flammability |
|
| Safety Data: |
Simple Ashyxiant |
| Physical Properties Data: |
| |
Critical Temperature: -399.8°F
Critical Pressure: 190.8 psia |
|
| HYDROGEN |
|
|
|
|
|
| Cylinder Data/Size |
K |
A |
B |
LB |
|
| Internal Volume (liters): |
50 |
44 |
17 |
0.4 |
|
| Contents (cubic feet): |
262 |
196 |
77 |
1.8 |
|
| Pressure @ 70°F (psig): |
2,400 |
2,000 |
2,000 |
1,800 |
|
| RFO Size (inches): |
0.007 |
0.010 |
0.014 |
0.020 |
|
| Maximum Flow (scf/h): |
225.2 |
459.5 |
900.7 |
1838.1 |
|
| Pressure (psia): |
2014.7 |
|
|
|
|
| DOT Label: Red, Flammable
Gas |
UN Number: UN 1049 |
|
| DOT Class:
2.1 |
Cylinder: Steel alloy |
|
Recommended Regulators:
|
Single-Stage, Stainless
Steel - Model 213 series
Single-Stage, Tied Diaphragm, Stainless Steel - Model 217 or
217CP (with cross purge) series
Two-Stage, Brass - Model 218 Series |
| NOTE: Due to flammability, do not use a regulator without purge
capabilty. |
| Shelf Life: 3 years |
|
| |
