| DESCRIPTION: |
Nitrous Oxide (N2O) is a colorless, nontoxic, nonflammable gas with a slightly sweet taste and odor, which can be used as an anesthetic agent. Nitrous Oxide is an oxidizing agent under normal conditions. Shipped as a liquefied gas under its own vapor pressure (745 psig @ 70 °F). |
| APPLICATION: |
Nitrous Oxide is used in combination with silane for chemical vapor deposition (CVD) of silicon nitride layers. Enhancing silane with high-purity Nitrous Oxide is essential to preventing degradation of the combined deposition gases. Nitrous Oxide is also used in rapid thermal processing to grow high quality gate oxides. |
 Order Nitrous Oxide toll-free: 866-704-6513 or Contact Us
|
| Critical Assay |
99.998% |
99.999% |
99.9997% |
| MEETS SEMI SPECIFICATION |
SEMI C3.13-93 |
SEMI C3.13-93 |
SEMI C3.13-93 |
| Nitrogen |
< 10 ppm |
< 5 ppm |
< 2 ppm |
| Oxygen |
< 2 ppm |
< 2 ppm |
< 0.4 ppm |
| Total Hydrocarbons (as CH4) |
< 1 ppm |
< 1 ppm |
< 0.1 ppm |
| Carbon Dioxide |
< 2 ppm |
< 2 ppm |
< 0.5 ppm |
| Water |
< 3 ppm |
< 3 ppm |
< 1 ppm |
| Carbon Monoxide |
< 1 ppm |
< 1 ppm |
< 0.1 ppm |
| Ammonia |
< 5 ppm |
< 5 ppm |
< 1 ppm |
| Nitric Oxide |
< 1 ppm |
< 0.5 ppmw |
< 0.5 ppm |
| Nitrogen Dioxide |
< 1 ppm |
< 0.5 ppm |
< 0.5 ppm |
| Halogens |
- |
< 0.5 ppm |
< 0.5 ppm |
| Valve Material |
Brass |
316L SS |
316L SS |
| Valve Design |
Diaphragm |
Diaphragm |
Diaphragm |
| CGA/DISS Connection |
326 |
326 |
326/712 |
Molecular
Weight: |
44.01 |
Specific
Volume: |
8.7 cf/lb @ NTP |
Boiling
Point: |
-127.4°F @ 1 atm |
CAS
No.: |
10024-97-2 |
Hazards: |
High Pressure and Suffocation and Oxidizer |
|
| Safety
Data: |
ACGIH - TLV: 50 ppm |
| Vapor Pressure
Data: |
| |
456.7 psia @ 32°F
759.7 psia @ 70°F |
|
| NITROUS OXIDE |
|
|
|
|
|
|
| Cylinder Data/Size |
K |
A |
AL |
B |
C |
CL |
| Internal Volume (liters): |
50 |
44 |
30 |
17 |
7 |
6 |
| Contents (lbs): |
65 |
60 |
40 |
20 |
6 |
6 |
| Phase Break @ 70°F (lbs): |
10.45 |
9.21 |
6.18 |
3.62 |
1.43 |
125 |
| Pressure @ 70°F
(psig): |
745 |
745 |
745 |
745 |
745 |
745 |
| DOT Label: Green, Nonflammable Gas; Yellow, Oxidizer |
UN Number: UN 1070 |
|
| DOT Class:
2.2 |
Cylinder: Aluminum or steel alloy |
|
| Recommended OmniGas® Panels: Two-valve
panel for inert gases - Model No. 58PA200NB |
Recommended Regulators:
|
Single-Stage, Stainless Steel - Model 213 series
Single-Stage, Tied Diaphragm, Stainless Steel - Model 217 series
Single-Stage, Brass - Model 2300 series |
| Shelf Life: 2 years |
|
| |
