| DESCRIPTION: |
Nitrogen Trifluoride (NF3)
is a colorless, toxic, nonflammable gas with little odor, which is
highly oxidizing and supports combustion. Nitrogen Trifluoride is shipped as a compressed
gas. |
| APPLICATION: |
Nitrogen trifluoride is used as a cleaning gas for
tool chambers as well as in a variety of etching applications. |
Order Nitrogen Trifluoride toll-free: 866-704-6513 or Contact
Us
|
| Critical Assay |
99.9% |
99.99% |
| Tetrafluoromethane |
< 700 ppmw |
< 100 ppmw |
| Nitrogen |
< 50 ppmw |
< 2 ppmw |
| Oxygen |
< 50 ppmw |
< 2 ppmw |
| Carbon Dioxide |
< 10 ppmw |
< 2 ppmw |
| Water |
< 1 ppmw |
< 1 ppmw |
| Hydrogen Fluoride |
< 1 ppmw |
< 1 ppmw |
| Sulfur Hexafluoride |
< 10 ppmw |
< 10 ppmw |
| Nitrous Oxide |
< 10 ppmw |
< 3 ppmw |
| Valve Material |
316L SS |
316L SS |
| Valve Design |
Diaphragm |
Diaphragm |
| CGA/DISS Connection |
330/640 |
330/640 |
Molecular Weight: |
71.0 |
Specific Volume: |
5.4 cf/lb @ NTP |
Boiling Point: |
-200°F @ 1 atm |
CAS No.: |
7783-54-2 |
Hazards: |
High Pressure and Oxidizer |
|
| Safety Data: |
LC50: 6,700 ppm
PEL - TWA: 10 ppm
ACGIH - TLV: 10 ppm
NIOSH IDLH: 1,000 ppm |
| Physical Properties Data: |
| |
Critical Temperature: -38.7°F
Critical Pressure: 646.9 psia |
|
| NITROGEN TRIFLUORIDE |
|
|
|
|
|
| Cylinder Data/Size |
A |
TB |
C |
|
|
| Internal Volume (liters): |
44 |
16 |
7 |
|
|
| Contents (lbs): |
44 |
16 |
7 |
|
|
| Pressure @ 70°F (psig): |
1,450 |
1,450 |
1,450 |
|
|
| RFO Size (inches): |
0.007 |
0.010 |
0.014 |
0.020 |
|
| Maximum Flow (scf/h): |
27.62 |
56.36 |
110.47 |
225.4 |
|
| Pressure (psia): |
1464.7 |
|
|
|
|
| DOT Label: Green, Nonflammable
Gas; Yellow, Oxidizer |
UN Number: UN 2451 |
|
| DOT Class:
2.2 |
Cylinder: Steel alloy |
|
|
| |
