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Nitric Oxide

NO

DESCRIPTION: Nitric Oxide (NO) is a colorless, nonflammable, toxic gas with a slight odor. Nitric Oxide is shipped in a nonliquefied form at a cylinder pressure of 427 psig or 500 psig at 70°F (depending on the grade).

APPLICATION: Nitric Oxide is used in diffusion processes employing atmospheric furnace systems to grow nitrided gate oxides for gigabit processes. Nitrix Oxide is also used to grow high quality gas silicon oxides.

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NITRIC OXIDE
GRADE ELECTRONIC VLSI GATE OXIDE
Critical Assay 99.0% 99.6% 99.99%
Oxygen - - < 1 ppm
Carbon Dioxide - - < 1 ppm
Total Hydrocarbons - - < 1 ppm
Hydrogen - - < 1 ppm
Water - - < 1 ppm
Valve Material 316L SS 316L SS 316L SS
Valve Design Tied Diaphragm Tied Diaphragm Tied Diaphragm
CGA/DISS Connection 660 660/728 728
Gate Oxide grade is recommended for use with N2O for the formation of oxynitride layers to improve performance and reliability of CMOS devices.

semi MSDS Nitric Oxide NO.pdf

  
Molecular Weight:
30.01
Specific Volume:
13 cf/lb @ NTP
Boiling Point:
-241.2°F @ 1atm
CAS No.:
10102-43-9
Hazards:
Inhalation, Skin Contact and Oxidier
Safety Data: LC50: 115 ppm
TLV - TWA: 25 ppm
NIOSH IDLH: 100 ppm
Physical Properties Data:
Critical Temperature: -135.2 °F
Critical Pressure: 949.4 psia

 

NITRIC OXIDE          
Cylinder Data/Size KAL A AL    
Internal Volume (liters): 49 44 30    
Contents (cubic feet): 60 56 31    
Pressure @ 70°F (psig): 500 500 427    
RFO Size (inches): 0.007 0.010 0.014 0.020 0.040
Maximum Flow (scf/h) @ 441.7 psia: 12.4 25.3 49.5 101.1 404.3
Maximum Flow (scf/h) @ 514.7 psia: 14.9 30.5 59.7 121.8 487.3
DOT Label: White, Inhalation Hazard; Yellow, Oxidizer; B&W Corrosive Gas UN Number: UN 1660
DOT Class: 2.3 Cylinder: Aluminum or steel alloy
Recommended OmniGas® Panels: Purgable panel for toxic gases - Model No. 58PA200SVA
Shelf Life: 1 year

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