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Oxygen

O2

DESCRIPTION: Oxygen (O2) is a colorless, odorless, nontoxic, highly oxidizing gas which sustains life and vigorously supports combustion. Oxygen is normally compressed and shipped at high pressures.

APPLICATION: Oxygen in high-purity is used in a broad range of oxidation, plasma etching and chemical vapor deposition (CVD) processes.

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OXYGEN
GRADE MOS VLSI
Critical Assay 99.97% 99.994%
Meets Semi Specification SEMI C3.16-95 SEMIC3.23-95
Nitrogen < 100 ppm < 15 ppm
Total Hydrocarbons (as CH4) < 1 ppm < 0.1 ppm
Carbon Dioxide < 2 ppm (+CO) < 0.5 ppm
Water < 2 ppm < 1 ppm
Carbon Monoxide - < 0.5 ppm
Nitrous Oxide < 2 ppm < 1 ppm
Argon < 50 ppm < 15 ppm
Rare Gases - < 10 ppm
Valve Material Brass Brass/Monel®
Valve Design Diaphragm Diaphragm
CGA/DISS Connection 540 540

 

Molecular Weight:
32.0
Specific Volume:
12.1 cf/lb @ NTP
Boiling Point:
-297.4°F @ 1 atm
CAS No.:
7782-44-7
Hazards:
High Pressure and Oxidizer
Safety Data: Supports Life
Physical Properties Data:
  Critical Temperature: -181.4°F
Critical Pressure: 731.4psia

 

OXYGEN          
Cylinder Data/Size K A B C  
Internal Volume (liters): 50 44 17 7  
Contents (cubic feet): 308 249 90 36  
Pressure @ 70°F (psig): 2,400 2,200 2,000 2,000  
DOT Label: Green, Nonflammable Gas; Yellow, Oxidizer UN Number: UN 1072  
DOT Class: 2.2 Cylinder: Steel alloy  
Recommended Regulators: Two-Stage, Brass - Model 218 series
Single-Stage, Brass - Model 2300 series
Shelf Life: 3 years

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