| DESCRIPTION: |
Phosphine (PH3) is a colorless,
highly toxic, flammable gas with an unpleasant odor similar to decaying
fish. Phosphine should be considered pyrophoric in high concentrations and
may form explosive mixtures with air. |
| APPLICATION: |
Phosphine is used in silicon processing as a phosphorus
(N-type dopant) source in chemical vapor deposition (CVD) and ion
implantation. Phosphine is also used in gallium arsenide as an ion implantation
gas in the manufacture of light emitting diodes (LEDs). |
Order Phosphine toll-free: 866-704-6513 or Contact
Us
|
| Critical Assay |
99.99% |
99.999% |
99.9996% |
| Meets SEMI Specification |
- |
SEMI C3.6-93 |
- |
| Nitrogen |
< 10 ppm |
< 1 ppm |
< 1 ppm |
| Oxygen |
< 3 ppm |
< 1 ppm |
< 0.1 ppm (+Ar) |
| Total Hydrocarbons (as CH4) |
< 3 ppm |
< 1 ppm |
< 0.1 ppm |
| Carbon Monoxide |
< 1 ppm |
< 1 ppm |
< 0.2 ppm |
| Carbon Dioxide |
< 10 ppm |
< 1 ppm |
< 0.2 ppm |
| Water |
< 1 ppm |
< 1 ppm |
< 1 ppm |
| Arsine |
< 10 ppm |
< 1 ppm |
< 1 ppm |
| Valve Material |
316L SS |
316L SS |
316L SS |
| Valve Design |
Diaphragm |
Diaphragm |
Diaphragm |
| CGA/DISS Connection |
350 |
350/632 |
350/632 |
Molecular Weight: |
34.0 |
| Specific Volume: |
11.4 cf/lb @ NTP |
Boiling Point: |
-125.9°F @ 1atm |
CAS No.: |
7803-51-2 |
Hazards: |
Inhalation and Flammability |
|
| Safety Data: |
LC50 Rat: 20 ppm
ACGIH - TLV: 0.3 ppm
ACGIH - STEL: 1 ppm
NIOSH IDLH: 50 ppm |
| Vapor Pressure Data:
|
|
310 psia@ 32 °F
499.7 psia @ 70 °F |
|
| PHOSPHINE |
|
|
|
|
|
| Cylinder Data/Size |
D |
LB |
|
|
|
| Internal Volume (liters): |
2.4 |
0.4 |
|
|
|
| Contents in lbs (grams): |
1 (454) |
0.1 (45) |
|
|
|
| Pressure @ 70°F (psig): |
485 |
485 |
|
|
|
| RFO Size (inches): |
0.007 |
0.010 |
0.014 |
0.020 |
|
| Maximum Flow (scf/h): |
16.59 |
33.86 |
66.36 |
135.4 |
|
| Pressure (psia): |
499.7 |
|
|
|
|
| DOT Label: |
White, Inhalation Hazard; Red, Flammable
Gas |
UN Number:
UN 2199 |
| DOT Class:
2.3 |
Cylinder: Steel alloy |
| Recommended OmniGas® Panels: Purgable panel for
toxic gases - Model No.
58PA200SVA |
| Shelf Life: 2 years |
|
| |
