The standard grades of pure gases and liquids listed here have been chosen to meet the varied requirements of lab and process engineers throughout the semiconductor industry. For example, Scott's Electronic Materials Group offers an exceptionally high grade of argon to reduce impurities in sputtering depositions. Scott electronic grade pure gases and liquids meet or exceed SMI specifications. Scott Sputtering, U.L.S.I., V.L.S.I., Etchant, Sigma 3, Sigma 5 and Nitride grades are of higher purity and exceed SEMI specifications where they exist. In addition, Scott extensive purification capabilities and processes enable us to provide custom grades of pure gases and liquids for the fab engineer with specialized requirements. Further, we are a one-stop source for supplying your new and unusual materials needs. Contact your Scott Representative for more information about custom pure gases and liquid products.
Pure gases and liquids are listed alphabetically. Each product includes useful technical information, available cylinder sizes with pressures and contents, along with appropriate safety information.
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Recommendations for regulators, purge panels and gas cabinets are also provided for safe handling of the product. Many of our listings include a product shelf life period that has been thoroughly tested and documented.
A number of products such as Halocarbon 14, helium and nitrogen are sold in a gaseous state. Others such as boron trichloride, hydrogen chloride and nitrous oxide are sold as liquids. For liquid-state products, vapor pressure at 70°F and boiling points at one atmosphere are included in product listings. Complete vapor pressure curves are available upon request. Each gas listing includes a specification table detailing total purity as well as guaranteed maximum concentrations of critical impurities. We have made every effort, based on input from our customers, to establish meaningful specifications for both purity assays and impurity specifications. To validate the impurity levels in the products we deliver, Scott has prepared sets of master trace gas standards for pure gas analysis. |
Pure Gas Products