Silicon Tetrachloride
|
SiCl4 |
| DESCRIPTION: |
Silicon Tetrachloride (SiCl4)
is a colorless, toxic, corrosive, nonflammable liquid whose vapors
are irritating to mucous membranes. Silicon Tetrachloride hydrolyzes rapidly with water
or moist air to form Hydrogen Chloride. It is shipped as a liquid. |
| APPLICATION: |
Silicon tetrachloride is used to plasma etch metals
and in epitaxial silicon applications. |
Order Silicon Tetrachloride toll-free: 866-704-6513 or Contact
Us
|
| Critical Assay |
99.95% |
| Boron |
< 0.2 ppb |
| Carbon |
< 1 ppm |
| Resistivity (ohm/cm) |
> 100 |
| Valve Material |
316L SS |
| Valve Design |
Tied Diaphragm |
| CGA/DISS Connection |
330/636 |
Molecular Weight: |
169.9 |
Specific Volume: |
2.28 cf/lb @ NTP |
Boiling Point: |
135.7°F @ 1 atm |
CAS No.: |
10026-04-7 |
Hazards: |
Inhalation and Skin Contact |
|
| Safety Data: |
LC50: 750 ppm |
| Vapor Pressure Data: |
| |
1.42 psia @ 32 °F
3.9 psia @ 70 °F |
|
| SILICON TETRACHLORIDE |
|
|
|
|
| Cylinder Data/Size |
A |
B |
C |
D |
LB |
| Internal Volume (liters): |
44 |
17 |
7 |
2.4 |
0.6 |
| Contents (lbs.): |
90 |
36 |
15 |
4 |
0.6 |
| Pressure @ 68 °F (psia): |
3.9 |
3.9 |
3.9 |
3.9 |
3.9 |
| DOT Label: B&W, Corrosive
Liquid |
UN Number: UN 1818 |
| DOT Class:
8 |
Cylinder: Steel alloy |
| Recommended OmniGas® Bubbler: Bubbler Five Valve
Panel - Model No. 58PA100C |
| Shelf Life: 2 years |
|
| |
