Silicon
Tetrafluoride |
SiF4 |
| DESCRIPTION: |
Silicon Tetrafluoride (SiF4) is a colorless,
toxic, nonflammable gas with a suffocating odor. Silicon Tetrafluoride is shipped as
a nonliquefied gas. |
| APPLICATION: |
Silicon Tetrafluoride is used to etch metal silicides,
silicon and polysilicon films. It disassociates in the presence of
an RF field to produce reactive fluoride ions that react with and
etch silicon films. Silicon Tetrafluoride demonstrates isotropic etching
with good selectivity over silicon dioxide and silicon nitride. Silicon Tetrafluoride
is used for these applications in the pure state and also in oxygen
mixtures as a precursor in the deposition of silicon nitride films. |
Order Silicon Tetrafluoride toll-free: 866-704-6513 or Contact
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|
| Critical Assay |
99.99% |
99.998% |
| Nitrogen |
< 50 ppm |
< 3 ppm |
| Argon + Oxygen |
< 20 ppm |
< 1 ppm |
| Carbon Dioxide |
< 10 ppm |
< 1 ppm |
| Total Hydrocarbons (as CH4) |
< 10 ppm |
< 10 ppm |
| Carbon Monoxide |
< 10 ppm |
< 0.5 ppm |
| Arsenic, Boron, Phosphorous |
- |
< 0.5 ppm |
| Valve Material |
316L SS |
316L SS |
| Valve Design |
Tied Diaphragm |
Tied Diaphragm |
| CGA/DISS Connection |
330/642 |
330/642 |
Molecular Weight: |
104.08 |
Specific Volume: |
3.7 cf/lb @ NTP |
Boiling Point: |
-130.4°F @ 1 atm |
CAS No.: |
7783-61-1 |
Hazards: |
Inhalation and Skin Contact |
|
| Safety Data: |
LC50: 450 ppm |
| Physical Properties Data: |
| |
Critical Temperature: 6.5 °F
Critical Pressure: 538.8 psia |
|
| SILICON TETRAFLUORIDE |
|
|
|
|
| Cylinder Data/Size |
A |
B |
C |
D |
LB |
| Internal Volume (liters): |
44 |
17 |
7 |
2.4 |
0.4 |
| Contents (lbs): |
50 |
18 |
7.5 |
2.5 |
0.4 |
| Pressure @ 70°F (psig): |
1,000 |
1,000 |
1,000 |
1,000 |
1,000 |
| RFO Size (inches): |
0.007 |
0.010 |
0.014 |
0.020 |
|
| Maximum Flow (scf/h): |
15.8 |
32.2 |
63.2 |
129 |
|
| Pressure (psia): |
1,014.7 |
|
|
|
| DOT Label: White, Inhalation
Hazard; B&W, Corrosive Gas |
UN Number: UN 1859 |
|
| DOT Class:
2.3 |
Cylinder: Steel alloy |
|
| Recommended OmniGas®
Panels: Purgeable panel for toxic gases - Model
No. 58PA200SVA |
| Shelf Life: 1 year |
|
| |
