| DESCRIPTION: |
Dichlorosilane (SiH2Cl2) is a
colorless, highly toxic, corrosive, flammable gas with a pungent and
suffocating odor. Dichlorosilane may ignite spontaneously above 100°C.
It becomes extremely corrosive in moist air, fuming and hydrolizing
to form Hydrochloric Acid and polymeric siloxanes. Shipped as a liquefied
gas under its own vapor pressure (9 psig @ 70°F). |
| APPLICATION: |
Dichlorosilane is a silicon precursor gas used in combination
with ammonia for silicon nitride chemical vapor deposition (CVD).
Dichlorosilane is also used for epitaxial silicon deposition. |
Order Dichlorosilane toll-free: 866-704-6513 or Contact
Us
|
| Critical Assay |
99.0% |
99.7% |
| Meets SEMI Specification |
SEMI C3.31-94 |
- |
| Chlorosilanes |
< 1 % |
- |
| Monochlorosilane |
- |
< 800 ppmw |
| Trichlorosilanes |
- |
< 2000 ppmw |
| Inerts |
< 1 % |
< 0.1% |
| Carbon |
< 2 ppmw |
< 0.05 ppmw |
| Arsenic |
< 0.1 ppbw |
< 0.03 ppbw |
| Boron |
< 0.1ppbw |
< 0.02 ppbw |
| Iron |
< 10 ppbw |
< 3 ppbw |
| Aluminum |
< 0.1 ppbw |
< 0.04 ppbw |
| Phosphorus |
< 0.1 ppbw |
< 0.05 ppbw |
| Silicon Tetrachloride |
- |
< 300 ppmw |
| Resistivity |
> 150 ohm/cm |
> 400 ohm/cm |
| Valve Material |
316L SS |
316L SS |
| Valve Design |
Tied Diaphragm |
Tied Diaphragm |
| CGA/DISS Connection |
678/636 |
678/636 |
| Please Note: Not recommended for Epitaxial Deposition
unless provided in 100SS or 10S(stainless steel) cylinders. |
Molecular Weight: |
101.01 |
Specific Volume: |
3.83 cf/lb @ NTP |
Boiling Point: |
46.8°F @ 1 atm |
CAS No.: |
4109-96-0 |
Hazards: |
Inhalation, Skin and Eye Contact, and Flammability |
| |
|
|
| Safety Data: |
LC50 Rat: 314 ppm |
| Vapor Pressure Data: |
| |
11.4 psia @ 32°F
23.7 psia @ 70°F |
|
| DICHLOROSILANE |
|
|
|
|
|
| Cylinder Data/Size |
A |
B |
C |
100SS |
|
| Internal Volume (liters): |
44 |
17 |
7 |
41 |
|
| Contents (lbs): |
90 |
35 |
10 |
90 |
|
| Phase Break @ 70°F, 9 psig
(lbs): |
0.65 |
0.26 |
0.1 |
0.61 |
|
| RFO Size (inches): |
0.020 |
0.030 |
0.040 |
|
|
|
| Maximum Flow (scf/h): |
3.1 |
7 |
12.39 |
|
|
|
| Pressure (psia): |
23.7 |
|
|
|
|
|
| DOT Label: White, Inhalation
Hazard; Red, Flammable Gas; B&W, Corrosive Gas |
UN Number:
UN 2189 |
| DOT Class:
2.3 |
Cylinder: Steel alloy or stainless steel |
| Recommended OmniGas® Panels: |
Purgeable panel for low vapor pressure gases - Model No. 58PA200SVA-H
with Hastelloy® Regulator - please
inquire |
| Shelf Life: 1 year |
|
| |
