| APPLICATION: |
Trichlorosilane is a source of silicon in CVD or eptiaxial
deposition of silicon. |
Order Trichlorosilane toll-free: 866-704-6513 or Contact
Us
|
| Critical Assay |
99.95% |
| Boron |
< 0.1 ppb |
| Carbon |
< 5 ppm |
| Resistivity (ohm/cm) |
> 300 |
| Valve Material |
316L SS |
| Valve Design |
Tied Diaphragm |
| CGA/DISS Connection |
670/636 |
Molecular Weight: |
135.5 |
Specific Volume: |
2.85 cf/lb @ NTP |
Boiling Point: |
89.4°F @ 1 atm |
CAS No.: |
10025-78-2 |
Hazards: |
Inhalation, Skin and Eye Contact, and Flammability |
|
| Safety Data: |
Not Available |
|
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| TRICHLOROSILANE |
|
|
|
|
|
|
| Cylinder Data/Size |
A |
B |
C |
D |
LB |
|
| Internal Volume (liters): |
44 |
17 |
7 |
2.2 |
.04 |
|
| Contents (lbs): |
115 |
44 |
18 |
5 |
1 |
|
| Pressure @ 70°F (psia): |
10.3 |
10.3 |
10.3 |
10.3 |
10.0 |
|
| RFO Size (inches): |
0.007 |
0.010 |
0.020 |
0.040 |
|
|
| Maximum Flow (scf/h): |
0.3 |
0.7 |
2.8 |
11.11 |
|
|
| Pressure (psia): |
10.3 |
|
|
|
| DOT Label: |
Red, Flammable Liquid; Blue, Dangerous
when Wet B&W, Corrosive |
UN Number:
UN 1295 |
| DOT Class:
4.3 |
Cylinder: Steel alloy |
Recommended OmniGas®
Panels: |
Purgeable panel for
corrosive gases - Model No. 58PA200SVA-H with Hastelloy®
Regulator - please inquire |
| Recommended
OmniGas® Bubbler: |
Bubbler
Five Valve Panel - Model No. 58PA100C |
| Shelf Life: 1 year |
|
| |
