| DESCRIPTION: |
Silane (SiH4) is a colorless,
toxic, noncorrosive, spontaneously flammable gas with a repulsive,
choking odor, which may form explosive mixtures with air. Silane also
reacts violently with heavy metal halides and most halogen compounds. |
| APPLICATION: |
Silane is used as a silicon precursor in the chemical
vapor deposition (CVD) of silicon dioxide, silicon nitride, polysilicon,
epitaxial silicon and amorphous silicon films. |
Order Silane toll-free: 866-704-6513 or Contact
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|
| Critical Assay |
99.9% |
99.99% |
99.999% |
99.9999%** |
| Nitrogen |
< 40 ppm |
< 25 ppm |
< 2 ppm |
< 1 ppm |
| Oxygen |
< 10 ppm |
< 10 ppm |
< 1 ppm |
< 0.2 ppm |
| Total Hydrocarbons |
< 40 ppm |
< 10 ppm |
< 0.5 ppm |
< 0.15 ppm |
| Carbon Dioxide |
< 10 ppm (+CO) |
< 5 ppm (+CO) |
< 1 ppm |
< 0.1 ppm |
| Carbon Monoxide |
- |
- |
< 1 ppm |
< 0.1 ppm |
| Water |
< 3 ppm |
< 3 ppm |
< 1 ppm |
< 0.5 ppm |
| Argon |
< 20 ppm |
< 5 ppm |
< 4 ppm |
< 0.5 ppm |
| Chlorosilanes |
< 10 ppm |
< 1 ppm |
< 0.1 ppm |
< 0.1 ppm |
| Helium |
- |
- |
- |
< 10 ppm |
| Hydrogen |
- |
- |
- |
< 20 ppm |
| Disilane |
- |
- |
- |
< 0.5 ppm |
| Disiloxane |
- |
- |
- |
< 0.1 ppm |
| Resistivity (ohm/cm) |
> 1,000 |
> 2,500 |
> 10,000 |
> 10,000 |
| Valve Material |
316L SS |
316L SS |
316L SS |
316L SS |
| Valve Design |
Diaphragm |
Diaphragm |
Diaphragm |
Diaphragm |
| CGA/DISS Connection |
350 |
350 |
350/632 |
350/632 |
| * Metals furnished upon request. ** Excluding hydrogen |
Molecular Weight: |
32.11 |
Specific Volume: |
12.1 cf/lb @ NTP |
Boiling Point: |
-168.7°F @ 1 atm |
CAS No.: |
7803-62-5 |
Hazards: |
Inhalation and Flammability |
|
| Safety Data: |
ACGIH - TLV: 5 ppm
LC50: 19,000 ppm |
| Physical Properties Data: |
| |
Critical Temperature: 25.8 °F
Critical Pressure: 702.5 psia |
|
| SILANE |
|
|
|
|
|
| Cylinder Data/Size |
A |
AL |
B |
C |
|
| Internal Volume (liters): |
44 |
30 |
17 |
7 |
Custom
fills available upon request |
| Contents (grams): |
14,000 - 5,000 |
5,000 |
2,000 |
500 - 100 |
| Pressure @ 70°F (psig): |
1,400 - 730 |
1,000 |
750 |
585 - 120 |
| RFO Size (inches): |
0.010 |
0.014 |
0.020 |
0.030 |
0.040 |
|
| Maximum Flow (scf/h): |
62.4 |
122.2 |
249.4 |
561.2 |
997.7 |
|
| Pressure (psia): |
1,090 |
|
|
|
|
| DOT Label: Red, Flammable
Gas |
UN Number: UN 2203 |
|
| DOT Class:
2.1 |
Cylinder: Aluminum or steel alloy |
|
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| |
