| DESCRIPTION: |
Sulfur Hexafluoride (SF6) is a colorless,
odorless, nonflammable, nonreactive, relatively nontoxic gas which
acts as a simple asphyxiant by displacing air. Shipped as a liquefied
gas under its own vapor pressure (305 psig @ 70°F). |
| APPLICATION: |
Sulfur Hexafluoride is used for plasma etching prior
to chemical vapor deposition (CVD). Processes include oxide etching,
nitride etching and wafer cleaning. Sulfur Hexafluoride gas, which
is itself inert, disassociates in the presence of an RF field to form
reactive fluoride ions. The resulting highly reactive ions are excellent
for etching tungsten and tungsten silicide films. |
Order Sulfur Hexafluoride toll-free: 866-704-6513 or Contact
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|
| Critical Assay |
99.98% |
99.999% |
| Meets SEMI Specifications |
SEMI C3.24-95 |
- |
| Nitrogen |
< 40 ppm |
< 5 ppm |
| Oxygen |
< 10 ppm |
< 3 ppm |
| Total Hydrocarbons (as CH4) |
< 5 ppm |
< 1 ppm |
| Halocarbon 14 |
< 100 ppm |
< 5 ppm |
| Water |
< 8 ppm |
< 3 ppm |
| Hydrogen Fluoride |
< 1 ppm |
< 0.1 ppm |
| Valve Material |
Brass |
Brass/316L SS |
| Valve Design |
Diaphragm |
Diaphragm |
| CGA/DISS Connection |
590 |
590/716 |
Molecular Weight: |
146.05 |
Specific Volume: |
2.65cf/lb @ NTP |
Boiling Point: |
-82.7°F @ 1 atm |
CAS No.: |
2551-62-4 |
Hazards: |
High Pressure and Suffocation |
|
| Safety Data: |
ACGIH - TLV: 1,000 ppm |
| Vapor Pressure Data: |
| |
184.4 psia @ 32 °F
320 psia @ 70 °F |
|
| SULFUR HEXAFLUORIDE |
|
|
|
|
| Cylinder Data/Size |
A |
B |
C |
LB |
| Internal Volume (liters): |
44 |
17 |
7 |
0.4 |
| Contents (lbs): |
100 |
35 |
10 |
0.5 |
| Phase Break @ 70°F (lbs): |
12.73 |
5.01 |
1.97 |
0.13 |
| Pressure @ 70°F (psig): |
305 |
305 |
305 |
305 |
| DOT Label: Green, Nonflammable
Gas |
UN Number: UN 1080 |
|
| DOT Class:
2.2 |
Cylinder: Steel alloy |
|
| Recommended
Regulators: |
Single-Stage, Stainless
Steel - Model 213 series
Single-Stage, Brass - Model 2300 series |
| Shelf Life: 3 years |
|
| |
